SM5G-015S [SMI]
Small, Gauge Pressure Sensor;型号: | SM5G-015S |
厂家: | Silicon Microstructures, Inc. |
描述: | Small, Gauge Pressure Sensor 仪表 |
文件: | 总7页 (文件大小:572K) |
中文: | 中文翻译 | 下载: | 下载PDF数据表文档文件 |
Small, Gauge Pressure Sensor
SM5G-GG Series
FEATURES
•
•
•
•
•
•
Improved stability with integrated field shields
Small SO8 surface-mount package
90 millivolt output
Constant current or constant voltage drive
Ported configuration
Wide operating temperature range (-40° to +125°C)
DESCRIPTION
The SM5G-GG Series is a small outline SO8 packaged pressure
sensor that incorporates SMI’s new SM30G MEMS piezoresistive
pressure sensing die. The SM5G-GG Series has been optimized to
provide the highest possible accuracy for a package of this size.
Performance is achieved through careful resistor placement and
mechanical configuration along with advanced MEMS processing.
The SM5G-GG Series is in a ported package. It can be used to sense
pressure in a manifold configuration with an O-ring seal.
The SM5G-GG Series is available in sticks or in tape & reel.
The packaged sensor is intended for high volume applications where
cost is a critical factor, such as industrial and medical products.
Samples of the SM5G-GG Series are available as a gauge pressure
sensors in several pressure ranges. It is designed to be surface-
mounted on ceramic or PC board substrates by high-volume OEM
manufacturers.
Industrial
Handheld Meters
Pneumatic Gauges
Pressure Switches
Consumer
Medical
Sports Equipment
Wound Therapy
Health Monitoring
Blood Pressure
Bioreactors
Appliances
Silicon Microstructures, Inc. 2001-2016. All rights reserved
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DOC # 40DS3008.04
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SM5G-GG Series
ABSOLUTE MAXIMUM RATING TABLE
All parameters are specified at VDD = 5.00 V DC SUPPLY at 25oC, unless otherwise noted.
No.
Characteristic
Supply Voltage(a)
Symbol
VDD
Minimum
Typical
Maximum
10
Units
1
2
3
0.0
-40
-40
V
Operating Temperature Range
Storage Temperature Range
TOP
+125
°C
°C
TSTG
-
+125
Notes:
a. If driven with constant current, the maximum supply voltage must not exceed 10 V.
Proof Pressure Burst Pressure
No.
Product
Operating Pressure
(PPROOF
)
(PBURST)
4a
4b
4c
4d
SM5G-005S
SM5G-015S
SM5G-030S(b)
SM5G-080S(b)
0-5 PSI
0-15 PSI
0-30 PSI
0-80 PSI
15 PSI
45 PSI
TBD
25 PSI
75 PSI
TBD
TBD
TBD
Notes:
b. This product is in development
Silicon Microstructures, Inc. 2001-2016. All rights reserved
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
DOC # 40DS3008.04
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SM5G-GG Series
OPERATING CHARACTERISTICS TABLE
All parameters are specified at VDD = 5.0 V DC SUPPLY at 25°C, unless otherwise noted.
No.
Characteristic
Symbol Minimum
Typical
Maximum
Units
5, 15, 80(b) PSI
30(b) PSI
Zero Offset
TC Span (c, e, f)
60
90
80
120
mV
5
Span (c, d)
VSPAN
55
105
45
mV
mV
6
7
8
9
VZERO
TCS
-25
-0.240
-75
10
-0.19
-
-0.155
75
%FS/oC
μV/oC
%RB/°C
TC Zero Offset (c, e, f)
TC Resistance (c, e, f)
5 PSI
TCZ
TCR
0.24
-0.35
-0.2
0.275
-
0.33
0.35
0.2
10
Linearity (c, f)
NL
%FS
15, 30(b), 80(b) PSI
-
11
12
13
Bridge Resistance
Pressure Hysteresis(g)
Thermal Hysteresis(h)
RB
4.0
5.0
0.1
0.15
6.0
kOhm
%FS
Phys
Thys
%FS
Notes:
b. This product is in development.
c. Tested on a sample basis.
d. The device can only be driven with the supply voltage connected to the pins as shown.
e. Determined by measurements taken at -40°C and 125°C.
f. Defined using best fit straight line.
g. Pressure hysteresis describes a phenomenon whereby the same applied pressure results in different output signals, depending upon
whether the pressure is approached from a lower or higher pressure. The values shown represent the maximum values over the specified
operating pressure and temperature range.
h. Temperature hysteresis describes a phenomenon whereby the same applied temperature results in different output signals depending
upon whether the temperature is approached from a lower or higher temperature. The values shown represent the maximum change of
zero offset at 25°C when the device is cycled over the specified operating temperature range.
Silicon Microstructures, Inc. 2001-2016. All rights reserved
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DOC # 40DS3008.04
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SM5G-GG Series
Diagrams & Dimensions
-
-
All dimensions are for reference only
All dimensions are in mm
Silicon Microstructures, Inc. 2001-2016. All rights reserved
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DOC # 40DS3008.04
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SM5G-GG Series
Pin 1
Pin 2
Pin 3
Pin 4
Pin 8
Pin 7
Pin 6
Pin 5
Pin-Out
PIN
Description
1
2
3
4
5
6
7
8
NC
+Sig
NC
Gnd
NC
-Sig
NC
+Vexc
Typical Operation
Pin No.
Description
Type
Value
2
+Sig
Analog Out
Gnd
-
4
6
8
Gnd
-Sig
0 V
-
Analog Out
Power
+Vexc
+5 V
Page 5
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Silicon Microstructures, Inc. 2001-2016. All rights reserved
DOC # 40DS3008.04
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SM5G-GG Series
Ordering Information
Full-Scale
Pressure Range
Cap
Configuration
Shipping
Configuration
Order Code
Pressure Type
SM5G-GGG-T-005S-000
SM5G-GGG-T-015S-000
5 PSI
Sticks or
Tape & Reel
Gauge
Port
15 PSI
Part Number Legend
Qualification Standards
•
•
•
•
REACH compliant
RoHS compliant
PFOS/PFOA compliant
For qualification specifications please contact Sales at sales@si-micro.com
Silicon Microstructures, Inc. 2001-2016. All rights reserved
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
DOC # 40DS3008.04
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SM5G-GG Series
Silicon Microstructures Warranty and Disclaimer:
Silicon Microstructures, Inc. reserves the right to make changes without further notice to any products herein and to
amend the contents of this data sheet at any time and at its sole discretion.
Information in this document is provided solely to enable software and system implementers to use Silicon
Microstructures, Inc. products and/or services. No express or implied copyright licenses are granted hereunder to
design or fabricate any silicon-based microstructures based on the information in this document.
Silicon Microstructures, Inc. makes no warranty, representation, or guarantee regarding the suitability of its products
for any particular purpose, nor does Silicon Microstructures, Inc. assume any liability arising out of the application or
use of any product or silicon-based microstructure, and specifically disclaims any and all liability, including without
limitation consequential or incidental damages. “Typical” parameters which may be provided in Silicon Microstructure’s
data sheets and/or specifications can and do vary in different applications and actual performance may vary over time.
All operating parameters, including “Typicals”, must be validated for each customer application by customer’s technical
experts. Silicon Microstructures, Inc. does not convey any license under its patent rights nor the rights of others. Silicon
Microstructures, Inc. makes no representation that the circuits are free of patent infringement. Silicon Microstructures,
Inc. products are not designed, intended, or authorized for use as components in systems intended for surgical implant
into the body, or other applications intended to support or sustain life, or for any other application in which the failure
of the Silicon Microstructures, Inc. product could create a situation where personal injury or death may occur. Should
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distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of,
directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even
if such claim alleges that Silicon Microstructures, Inc. was negligent regarding the design or manufacture of the part.
Silicon Microstructures, Inc. warrants goods of its manufacture as being free of defective materials and faulty
workmanship. Silicon Microstructures, Inc. standard product warranty applies unless agreed to otherwise by Silicon
Microstructures, Inc. in writing; please refer to your order acknowledgement or contact Silicon Microstructures, Inc.
directly for specific warranty details. If warranted goods are returned to Silicon Microstructures, Inc. during the period
of coverage, Silicon Microstructures, Inc. will repair or replace, at its option, without charge those items it finds
defective. The foregoing is buyer’s sole remedy and is in lieu of all warranties, expressed or implied, including those of
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consequential, special, or indirect damages.
While Silicon Microstructures, Inc. provides application assistance personally, through its literature and the Silicon
Microstructures, Inc. website, it is up to the customer to determine the suitability of the product for its specific
application. The information supplied by Silicon Microstructures, Inc. is believed to be accurate and reliable as of this
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assumes no responsibility for any inaccuracies and/or errors in this publication and reserves the right to make changes
without further notice to any products or specifications herein
Silicon Microstructures, Inc.TM and the Silicon Microstructures, Inc. logo are trademarks of Silicon Microstructures, Inc.
All other service or product names are the property of their respective owners.
© Silicon Microstructures, Inc. 2001-2016. All rights reserved.
Silicon Microstructures, Inc. 2001-2016. All rights reserved
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
DOC # 40DS3008.04
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