F3M-S626 [OMRON]
Silicon Wafer Mapping Sensor;
| 型号： | F3M-S626 |
| 厂家： | 
OMRON ELECTRONICS LLC |
| 描述： | Silicon Wafer Mapping Sensor |
| 文件： | 总7页 (文件大小：316K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
R
Silicon Wafer Mapping Sensor
F3M-S
Allows Simultaneous Mapping of up
to 25 Silicon Wafers
H Economical, one sensor detects most
wafer types, including dummy wafers
H Models match wafer sizes of 300 mm,
200 mm and 150 mm
H Automatic and remote teaching
capability
H Self-diagnostic functions reduce
downtime
Ordering Information
Applicable wafer size
Number of cassette slots
Function
Remarks
Part number
F3M-S625
F3M-S626
F3M-S825
F3M-S826
F3M-S1213
F3M-S1225
6 inches (4.76-mm pitch)
25
26
25
26
13
25
Self-diagnosis
---
---
---
8 inches (6.35-mm pitch)
12 inches (10-mm pitch)
Self-diagnosis
---
---
---
Self-diagnosis
Self-diagnosis
CE marking
CE marking
Application Examples
Detects Transparent Glass Wafers
with a Transparency of 92%
(F3M-S6j and F3M-S8j)
Answer-back Alarms for Setting Errors and
Self-diagnostic Alarms for Operation Errors
These alarms help reduce system downtime and shorten
The F3M-S allows the mapping of cassettes that have both
silicon wafers and glass wafers. The F3M-S also accurately
detects dummy wafers in the carrier used to test coating or
processing tolerances.
troubleshooting time.
Note: The self-diagnostic output function is not incorporated by
the F3M-S826/-S626.
Static Electricity Protection
Automatic Teaching Saves Setting Time
Remote Teaching Available
The F3M-S has an automatic teaching function that ensures easy
adjustments within a minimal time. The remote teaching function
allows quick, on-the-fly set up.
OMRON’s optical system, including an emitter and receiver,
prevents Sensor malfunction and damage by protecting the
Sensor from static electricity that may be charged on
semiconductor wafers at the time of mapping.
2
F3M-S
F3M-S
Specifications
J RATINGS/CHARACTERISTICS
Part number
F3M-S625
F3M-S626
F3M-S825
F3M-S826
F3M-S1213
F3M-S1225
Sensing object
6-inch (5-inch) semiconductor
silicon wafers and transparent
wafers (with transparency of
92% max.) (See Note.)
8-inch semiconductor silicon
wafers and transparent wafers
(with transparency of 92% max.)
(See Note.)
12-inch semiconductor silicon
wafers and 12-inch SIC wafers
(with transparency of 30% max.)
Number of channels
Optical axis pitch
Optical axis width
Light source
25
26
25
26
13
25
4.76 mm
1.5 mm
6.35 mm
10 mm
Infrared LED (940 nm)
Power supply voltage
Current consumption
12 to 24 VDC ±10%, ripple (p-p): 10% max.
120 mA max.
Output
Control
output
Load power supply voltage: 30 VDC
Load current: 20 mA max. (residual voltage: 1 V max.)
Inflow current: 20 mA
Parallel output from all channels, NPN open collector
Dark-ON operation
Answer-back When remote teaching is ON, pin 28 will be used for this function.
output
Self-
diagnostic
Load power
supply voltage:
---
Load power
supply voltage:
---
Load power supply voltage:
30 VDC max.
output
30 VDC max.
30 VDC max.
Load current: 20 mA max.
Load current:
20 mA max.
(Residual
voltage: 1 V
max.)
Load current:
20 mA max.
(Residual
voltage: 1 V
max.)
(Residual voltage: 1 V max.)
Inflow current: 20 mA
NPN open collector
Inflow current:
20 mA
Inflow current:
20 mA
NPN open
collector
NPN open
collector
Indicators
Power
Green indicator is ON when power is being supplied.
Red indicator is ON under the following conditions:
Warning
Teaching, no sensing object, insufficient light, or error.
Response time
10 ms max.
Control output interrupt input All outputs interrupted: GND and control output interrupt input terminals are short-circuited and 0-V
short-circuit current is 1 mA max.
Output interrupt reset: GND and control output interrupt input terminals are opened or the voltage is
between 9 V and the working power supply voltage.
Remote
teaching
input
ON
GND and remote input terminals are short-circuited and 0-V short-circuit current is 1 mA max.
OFF
GND and remote input terminals are opened or the voltage is between 9 V and the working power
supply voltage.
Teaching check function
Orange LED indicator
Ambient
temperature
Operating
0°C to 40°C (32°F to 104°F) with no icing or condensation
0°C to 55°C (32°F to 131°F)
with no icing or condensation
Storage
-- 2 5 °C to 60°C (--13°F to 140°F)
-- 2 5 °C to 60°C (--13°F to 140°F)
Relative humidity
Ambient illumination
Noise resistance
35% to 85% with no condensation
Fluorescent lamp: 1,500 ℓx max.
Power supply line: ±480 V in normal mode with noise simulator
Static electrical noise: No malfunction or destruction at ±8 kV
10 to 55 Hz, 0.5-mm double amplitude for 2 hrs each in X, Y, and Z axes
Vibration resistance
Shock resistance
Degree of protection
Connection
2
300 m/s (30G) for 3 times each in X, Y, and Z axes
IEC60529 IP40
Preleaded cable (standard cable length: 100 mm)
Connector
(This table continues on the next page.)
3
F3M-S
F3M-S
Specifications Table -- continued from previous page
Part number
F3M-S625
Approx. 110 g
Polycarbonate
ABS
F3M-S626
F3M-S825
F3M-S826
F3M-S1213
F3M-S1225
Approx. 300 g
Weight (packed state)
Approx. 200 g
Material
Optical axis
Case
ABS, aluminum (alumite
treated/clear finish)
Cable
Vinyl-insulated, bending type
Spacer and instruction manual
---
Accessories
Instruction manual
Note: Operating conditions are restricted for the detection of transparent wafers. Contact your OMRON representatives for details.
The remote or manual automatic teaching of the F3M-S is
possible with the following two sensitivity settings:
J AUTOMATIC TEACHING FUNCTION
1. Max. Sensitivity Setting: Detects semiconductor silicon
F3M-S6j and F3M-S8j
wafers, translucent dummy wafers, and SIC wafers.
Power indicator
Warning indicator
2. Teaching with No Target Object: Detects transparent wafers
(except F3M-S12j).
The sensitivity is set to maximum before shipping. Refer to the
Instruction Manual when setting the sensitivity of the F3M-S.
Teaching indicator
Teaching button
RUN/TEACH mode selector
J ANSWER-BACK FUNCTION AND
F3M-S12j
SELF-DIAGNOSTIC FUNCTION
Power indicator
RUN/TEACH mode selector
Teaching button
Teaching indicator
Warning indicator
The F3M-S has an answer-back function to warn the user about
setting errors and a self-diagnostic function (except F3M-S626
and F3M-S826) to warn the user about operational errors.
•
Answer-back Function: Normal or error teaching output turns
ON.
•
Self-diagnostic Function: Warning output turns ON for a
decrease in optical input.
4
F3M-S
F3M-S
Operation
J OUTPUT CIRCUIT DIAGRAM
J I/O TERMINAL ARRANGEMENT
+V
Output
(OUT1)
Pin assignment
Pin Assignment
Pin
16
Assignment
OUT14
OUT15
OUT16
OUT17
OUT18
OUT19
OUT20
OUT21
OUT22
OUT23
OUT24
OUT25
Output (see note)
(OUT26)
1
2
3
4
5
6
7
8
9
GND (0 V)
V
CC
(12 to 24 V) 17
OUT1
OUT2
OUT3
OUT4
OUT5
OUT6
OUT7
18
19
20
21
22
23
24
25
26
27
28
Control output interrupt input
Remote teaching input
10 OUT8
11 OUT9
0 V
12 OUT10
13 OUT11
Self-diagnostic output/OUT26
(see note 1)
Note: When remote teaching is input, this output will be for
answer-back output. For Sensors other than
14 OUT12
15 OUT13
29
30
Control output interrupt input
Remote teaching input
F3M-S626/F3M-S826, this output is for self-diagnostic
output. For F3M-S626/F3M-S826, this output is OUT26.
Note: 1. Pin 28 will have answer-back output only when remote
teaching input is turned ON. Otherwise, for Sensors
other than F3M-S626/F3M-S826, this output is for self-
diagnostic output. For F3M-S626/F3M-S826, this out-
put is OUT26.
2. For the F3M-S1213, terminals for pins 16 to 27 are not
used.
5
F3M-S
F3M-S
Dimensions
Unit: mm (inch)
J F3M-S625
J F3M-S626
135 (5.31)
135 (5.31)
14 (0.55)
14 (0.55)
Optical axis
Optical axis
18.5 (0.71)
50
18.5 (0.71)
Two,
Two,
50
(1.97)
4.2-dia.
mounting
holes
Two, R4
4.2-dia.
mounting
holes
(1.97)
Thirty, (19/0.08 dia.)
vinyl-insulated, flat
bending cable
Width: 38.1
Side mark
Thirty, (19/0.08 dia.)
vinyl-insulated, flat
bending cable
Width: 38.1
(3.94)
Side mark
(3.94)
Pitch: 1.27
Pitch: 1.27
OMRON XG4E-3031
Connector
OMRON XG4E-3031
Connector
Warning indicator
Teaching button
RUN/TEACH
Warning indicator
Teaching indicator
Power indicator
Teaching button
RUN/TEACH
Teaching indicator
Power indicator
mode selector
mode selector
Mounting Dimensions
Mounting Dimensions
Two, M4
Two, M4
(4.72)
(4.72)
J F3M-S825
J F3M-S826
170 (6.69)
175 (6.89)
14 (0.55)
14 (0.55)
Optical axis
Optical axis
18.5 (0.71)
18.5 (0.71)
50
50
(1.97)
Two , R5
(1.97)
Two , R5
Side mark
Side mark
Two,
(3.94)
(3.94)
Two,
Thirty, (19/0.08 dia.)
vinyl-insulated, flat
bending cable
Width: 38.1
4.2-dia.
mounting
holes
Thirty, (19/0.08 dia.)
vinyl-insulated, flat
bending cable
Width: 38.1
4.2-dia.
mounting
holes
Pitch: 1.27
Pitch: 1.27
OMRON XG4E-3031
Connector
OMRON XG4E-3031
Connector
Teaching button
RUN/TEACH mode selector
Warning indicator
Teaching indicator
Power indicator
Warning indicator
Teaching indicator
Power indicator
Teaching button
RUN/TEACH mode selector
Mounting Dimensions
Mounting Dimensions
Two, M4
Two, M4
(6.30)
(6.30)
6
F3M-S
F3M-S
J F3M-S1213
J F3M-S1225
Power indicator
Teaching indicator
Warning indicator
Power indicator
Teaching indicator
Warning indicator
RUN/TEACH mode selector
Teaching button
RUN/TEACH mode selector
Teaching button
Two, M4, depth: 8
(mounting holes)
Two, M4, depth: 8
(mounting holes)
25 (0.98)
25 (0.98)
18 (0.71)
Optical axis
Optical axis
18 (0.71)
OMRON XG4A-3034
Connector
OMRON XG4A-3034
Connector
Optical axis
Optical axis
50
(1.97)
50
(1.97)
260 (10.24)
140 (5.51)
Optical axis
Optical axis
Precautions
J CORRECT USE
J CLEANING
Avoid Damage to the F3M-S
Do not attempt to clean the F3M-S using paint thinner, to avoid
damaging the surface of the F3M-S.
•
Do not use the F3M-S at a voltage that exceeds the rated
voltage range.
J POWER SUPPLY
•
•
•
Do not make mistakes in wiring, such as mistakes in polarity.
Do not short-circuit the load.
If a standard switching power supply is connected to the F3M-S,
be sure to ground the FG (frame ground) and G (ground)
terminals of the power supply. The F3M-S may malfunction due
to switching noise that will be generated from the power supply if
these terminals are not grounded.
Do not connect AC to the F3M-S.
J INSTALLATION/ENVIRONMENT
Do NOT use the F3M-S in the following places:
•
•
•
•
Places exposed to direct sunlight.
Places with high humidity that may cause condensation.
Places with corrosive gas.
Places with vibration or shock directly affecting the Sensor.
J CONNECTION AND MOUNTING
•
•
•
A maximum of 24 VDC+10% can be imposed on the F3M-S.
Check that the voltage of the power supply is within the per-
missible range before turning on the F3M-S. The power sup-
ply must be constructed so that the secondary circuit is insu-
lated with an isolating transformer.
Do not wire power lines or high-tension lines within the same
conduit with the lines of the F3M-S, or the F3M-S may be
damaged or malfunction due to induction. You must wire the
lines of the F3M-S separate from power lines or high-tension
lines or laid in an separate, shielded conduit.
Avoid mechanical impact when mounting the F3M-S, or the
water-resistant properties of the F3M-S will be reduced.
7
F3M-S
F3M-S
NOTE: DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters to inches divide by 25.4.
R
OMRON ON--LINE
OMRON ELECTRONICS LLC
One East Commerce Drive
Schaumburg, IL 60173
OMRON CANADA, INC.
885 Milner Avenue
Scarborough, Ontario M1B 5V8
Global -- http://www.omron.com
USA -- http://www.omron.com/oei
Canada -- http://www.omron.com/oci
1-800-55-OMRON
416-286-6465
Cat. No. CEDSAX4
11/01
Specifications subject to change without notice.
Printed in U.S.A.
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