2SMPP-03 [OMRON]

MEMS Gauge Pressure Sensor; MEMS压力计压力传感器
2SMPP-03
型号: 2SMPP-03
厂家: OMRON ELECTRONICS LLC    OMRON ELECTRONICS LLC
描述:

MEMS Gauge Pressure Sensor
MEMS压力计压力传感器

传感器 压力传感器 仪表
文件: 总10页 (文件大小:503K)
中文:  中文翻译
下载:  下载PDF数据表文档文件
2MESMSMGauPge PPressure Sensor  
MEMS Gauge Pressure Sensor Featuring  
Small Size and Low Power Consumption  
• Ultra-miniature 6.1 × 4.7 × 8.2 mm (L × W × H).  
• Piezo Resistive element provides electrical characteristics  
that are superior to capacitive type pressure sensors.  
• 0 to 37 kPa (2SMPP-02) or -50 to 50 kPa (2SMPP-03)  
pressure range.  
• Low Power consumption of 0.2 mW  
• Low Temperature Influence  
• RoHS Compliant  
Ordering Information  
Standard Models with Surface mount package  
Classification  
Bottom Port Type  
Pressure Range  
0 to 37 kPa  
-50 to 50 kPa  
Structure  
Packaging  
Plastic sleeve  
Model  
2SMPP-02  
2SMPP-03  
SOP  
Terminal Arrangement  
Application Examples  
• Medical equipment  
• Home appliance  
• Air movement control  
• Level indicators  
Icc  
Vout (+)  
Non Conneted  
Nsub  
(Connect to ICC  
• Leak detection  
)
• Pressure controller  
Vout ()  
GND  
MEMS Gauge Pressure Sensor 2SMPP  
35  
Specifications  
Ratings  
Item  
2SMPP-02  
2SMPP-03  
Pressure type  
Sensing type  
Applicable gases  
Gauge Pressure  
Piezo Resistive  
Air (Non-corrosive, dust free)  
Ratings  
Pressure range  
0 to 37 kPa  
Max. 53 kPa  
-50 to 50 kPa  
-80 to 120 kPa  
Withstand pressure  
Supply current  
100 μADC (130 μADC absolute max.)  
0 to 50°C (with no icing or condensation)  
15 to 90%RH (with no icing or condensation) 10 to 95%RH (with no icing or condensation)  
30 to 85°C (with no icing or condensation) 40 to 120°C (with no icing or condensation)  
10 to 95%RH (with no icing or condensation)  
100 μADC (200 μADC absolute max.)  
-10 to 100°C (with no icing or condensation)  
Ambient operating temperature  
Ambient operating humidity  
Ambient storage temperature  
Ambient storage humidity  
Note: 1. The above values are initial values measured at ambient temperature condition of 23°C.  
2. Please avoid caustic gases.  
3. Standard 2SMPP-02 product is not calibrated for negative pressures.  
Electrical Characteristics  
Item  
2SMPP-02  
0 to 37 kPa  
2SMPP-03  
Pressure type  
Positive  
Negative  
Operating pressure range  
Bridge resistance  
0 to 50 kPa  
20 ± ±2 kΩ  
-50 to 0 kPa  
Offset voltage (See note 2.)  
Span voltage (See note 2.)  
Non-Linearity (See note 2.)  
Hysteresis (See note 2.)  
Temperature influence of Span  
2.5 ± ±4.0 mV  
42.0 ± ±5.5 mV (at 50 kPa)  
0.8 ± ±0.5%FS (at 50 kPa)  
31.0 ± ±3.1 mV (at 37 kPa)  
0 ± ±0.8%FS (0 to 37 kPa)  
0 ± ±0.5%FS (0 to 37 kPa)  
0.5 ± ±1.0%FS (at 0°C)  
0.3 ± ±1.0%FS (at 50°C)  
- - -  
-43.0 5.5 mV (at -50 kPa)  
0.2 ± ±0.5%FS (at -50 kPa)  
0 ± ±0.2%FS (-50 to 50 kPa)  
1.0 ± ±2.0%FS (at 0°C)  
-0.1 ± ±2.0%FS (at 50°C)  
1.0 ± ±3.0%FS (at 85°C)  
0.8 ± ±2.0%FS (at 0°C)  
0.1 ± ±2.0%FS (at 50°C)  
1.2 ± ±3.0%FS (at 85°C)  
Temperature influence of Offset  
0 ± ±3.0%FS (0 to 25°C)  
0 ± ±3.0%FS (25 to 50°C)  
- - -  
-1.0 ± ±3.0%FS (at 0°C)  
1.0 ± ±3.0%FS (at 50°C)  
2.0 ± ±5.0%FS (at 85°C)  
Note: 1. The above values are initial values measured at ambient temperature condition of 23°C.  
2. Not including temperature influence.  
3. The above values are operated at 100 μADC  
Environment Characteristics  
Item  
2SMPP-02  
2SMPP-03  
Vibration resistance  
Destruction  
Malfunction  
Destruction  
Malfunction  
10 Hz to 500 Hz 10 G  
10 Hz to 500 Hz 10 G  
Shock resistance  
15 G  
15 G  
Life Expectancy  
ESD  
300,000 Operations min. (0 to 39 kPa)  
100,000 Operations min. (0 to 75 kPa)  
1000 V (Human body model)  
Weight  
0.17 g  
Package Material  
PPS (Polyphenylenesulfide)  
36  
MEMS Gauge Pressure Sensor 2SMPP  
Engineering Data (for reference)  
Output Characteristics - 2SMPP-02  
Rated Pressure vs. Output Voltage  
40  
35  
30  
25  
20  
15  
10  
5
0
5  
0
10  
20  
30  
40  
50  
Rated Pressure [kPa]  
Note: 1. Ambient temperature condition: 25°C  
2. Drive current: 100 μA  
3. These output voltage characteristics are measured with tester without a mounting board.  
4. The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual  
equipment before use.  
Temperature influence of Span voltage  
Temperature influence of Offset voltage  
2.0  
2.0  
1.5  
1.0  
1.5  
1.0  
0.5  
0.5  
0.0  
0.5  
1.0  
1.5  
2.0  
0.0  
0.5  
1.0  
10  
0
10  
20  
30  
40  
50  
60  
10  
0
10  
20  
30  
40  
50  
60  
Temperature [°C]  
Temperature [°C]  
Note: 1. Measured points are 0°C and 25°C, 50°C  
2. Drive current: 100 μA  
3. These output voltage characteristics are measured with tester without a mounting board.  
4. The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual  
equipment before use.  
MEMS Gauge Pressure Sensor 2SMPP  
37  
Pressure cycle range (0 to 40 kPa)  
1
1
0.5  
0
0.5  
0
0.5  
1  
0.5  
1  
0
100000  
200000  
300000  
0
100000  
200000  
300000  
Pressure cycle  
Pressure cycle  
Note: 1. Tested temperature condition: 25°C  
2. Number of pressure cycle time: 3 x 105  
3. Rated cycle pressure: 0 to 40 kPa  
4. These output voltage characteristics are measured with tester without a mounting board.  
Output Characteristics - 2SMPP-03  
Rated Pressure vs. Output Voltage  
40  
30  
20  
10  
0
-10  
-20  
-30  
-40  
-50  
-50 -40 -30 -20 -10  
0
10 20 30 40 50  
Rated Pressure [kPa]  
Note: 1. Ambient temperature condition: 25°C  
2. Drive current: 100 μA  
3. These output voltage characteristics are measured with tester without a mounting board.  
4. The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual  
equipment before use.  
38  
MEMS Gauge Pressure Sensor 2SMPP  
Temperature influence of Span voltage (at 50 kPA)  
Temperature influence of Offset voltage (at 0 kPa)  
3.0  
2.5  
2.0  
1.5  
1.0  
2.0  
1.5  
1.0  
0.5  
0.5  
0.0  
0.0  
-0.5  
-1.0  
-1.5  
-2.0  
-0.5  
-1.0  
-10  
0
10 20 30 40 50 60 70 80 90  
Temperature [°C]  
-10  
0
10 20 30 40 50 60 70 80 90  
Temperature [°C]  
Note: 1. Measured points are 0°C, 25°C, 50°C and 85°C at 0 to 50 kPa.  
2. Drive current: 100 μA  
3. These output voltage characteristics are measured with tester without a mounting board.  
4. The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual  
equipment before use.  
Pressure cycle range (0 to 75 kPa)  
1
0.5  
0
1
0.5  
0
-0.5  
-1  
-0.5  
-1  
0
25000  
50000  
75000  
100000  
0
25000  
50000  
75000  
100000  
Pressure cycle  
Pressure cycle  
Note: 1. Tested temperature condition: 25°C  
2. Number of pressure cycle time: 1 x 105  
3. Rated cycle pressure: 0 to 75 kPa  
4. These output voltage characteristics are measured with tester without a mounting board.  
MEMS Gauge Pressure Sensor 2SMPP  
39  
Example of application circuit for MEMS Pressure Sensor  
VDD  
Constant current circuit unit  
Amplifier circuit unit  
Pressure  
Sensor  
+
±−  
+
±−  
±−  
+
Vout  
±−  
+
1. The pressure sensor is designed to convert a voltage by means of constant current drive.  
2. Please amplify the output voltage of the pressure sensor by using the amplifying circuit if necessary.  
40  
MEMS Gauge Pressure Sensor 2SMPP  
Dimensions  
Note: All units are in millimeters unless otherwise indicated.  
2SMPP-02  
2SMPP-03  
4.75  
4.00  
± 0.05  
0.25  
3
#1  
φ3.80  
φ0.62  
6.15 5.40  
4-R0.50  
9.85  
3.20  
4
6
1.27  
0.40  
1.27 x 2 = 2.54  
1.00  
2.00  
The tolerance is 0.3mm unless otherwise specified.  
1.50  
2.80  
1.00  
(1.10)  
4.75  
φ1.80  
φ2.60  
Top view  
1
2
3
6
5
4
Vout (+)  
Icc  
NC  
N-sub  
Vout (-)  
GND  
Marking  
5.45  
0.10  
0.75  
*
0.90  
1.125  
1.125  
P P 0 2  
4.05  
0.45  
5 6 7  
8
(0.90)  
1.65  
1.65  
LOT NUMBER  
(1.075)  
3.30  
*part will be marked “PP03” for 2SMPP-03  
MEMS Gauge Pressure Sensor 2SMPP  
41  
Precautions  
Precautions for Correct Use  
Handling  
Mounting  
Only air can be used as pressure media on the products directly. It  
is prohibited to use pressure media including corrosive gases (e.g.  
organic solvents gases, sulfur dioxide and hydrogen sulfide gases),  
fluid and any other foreign materials.  
Use lands on the printed-circuit boards to which the sensor can be  
securely fixed.  
Fix pin No.2 on the printed-circuit boards, not fixed causes fluctua-  
tion of sensor output signals.  
The products are not water proof. Please keep dry in use.  
Soldering  
Don't use the products under dew-condensing conditions. Frozen  
fluid on sensor chips may also cause fluctuation of sensor output  
and other troubles.  
Due to its small size, the thermal capacity of the pressure sensor is  
low. Therefore, take steps to minimize the effects of external heat.  
Don't put foreign materials (e.g. a wire or pin) into connecting tube.  
It may cause breakage of pressure sensor chips or fluctuation of  
sensor output caused by clogging the tube.  
Use the products within rated pressure. Usage at pressure out of  
the range may cause breakage.  
Dip soldering bath: Max.260°C, within 10 sec.  
Soldering iron: Max. 260°C, within 10 sec.  
Do not heat the case of sensor package, heat only terminal.  
Use a non-corrosive resin type of flux. Since the pressure sensor  
chip is exposed to the atmosphere, do not allow flux to enter inside.  
Don't use under high-frequency vibration including ultrasonic wave.  
Cleaning  
The products may be broken by static electricity. Charged materials  
(e.g. a workbench and a floor) and workers must provide measures  
against static electricity, including ground connection.  
Since the pressure sensor chip is exposed to atmosphere, do not  
allow cleaning fluid to enter inside.  
Overpowering terminals may deform them and detract their solder-  
ability. Don't drop or handle the products roughly.  
Avoid ultrasonic cleaning since this may cause breaks or discon-  
nections in the wiring.  
Don't use the products under humid or dusty condition.  
Terminals connection of pressure sensors must be handled as  
directed by a connection diagram.  
Coating  
Do not coat the pressure sensor when it is mounted to the print cir-  
cuit board.  
Do not wash the print circuit board after the pressure sensor is  
mounted using detergent containing silicone. Otherwise, the deter-  
gent may remain on the surface of the pressure sensor.  
Environmental Conditions for Transport and Storage  
It is prohibited to keep the products with corrosive gases (e.g.  
organic solvents gases, sulfur dioxide and hydrogen sulfide gases).  
The products are not water proof. Please keep dry during storage.  
An anti-static treatment has been applied to the sleeves. Please  
note the following points.  
1. Getting wet may remove an anti-static treatment and elimi-  
nate its effect.  
2. The sleeves may feel sticky under hot and humid condition  
due to the nature of the anti-static treatment.  
3. Anti-static has aging degradation. It is prohibited to keep the  
sleeves for more than six months. The sleeves are also non-  
reusable.  
Don't keep the products under humid or dusty condition.  
Definitions  
1. Offset voltage is defined as the ouput voltage at 0 kPa rated pressure  
2. Positive span voltage is defined as the algebraic difference between the output voltage at 50 kPa rated pressure and and the output voltage at  
0 kPa rated pressure. (37 kPa and 0 kPa for 2SMPP-02)  
3. Negative span voltage is defined as the algebraic difference between the output voltage at -50 kPa rated pressure and the output voltage at 0  
kPa rated pressure. (Not applicable for 2SMPP-02)  
4. Hysteresis is defined as follows; {The maximum value of difference at the same pressure}/span voltage x 100 %FS  
5. Temperature influence of span voltage is defined as follows;  
{Span voltage at 0°C - span voltage at 25°C}/span voltage at 25°C x 100%FS  
{Span voltage at 50°C - span voltage at 25°C}/span voltage at 25°C x 100%FS  
{Span voltage at 85°C - span voltage at 25°C}/span voltage at 25°C x 100%FS - - - does not apply to 2SMPP-02  
6. Temperature influence of offset voltage is defined as follows  
{Offset voltage at 0°C - offset voltage at 25°C}/span voltage at 25°C x 100%FS  
{Offset voltage at 50°C - offset voltage at 25°C}/span voltage at 25°C x 100%FS  
{Offset voltage at 85°C - offset voltage at 25°C}/span voltage at 25°C x 100%FS - - - does not apply to 2SMPP-02  
42  
MEMS Gauge Pressure Sensor 2SMPP  
MEMO  
MEMS Gauge Pressure Sensor 2SMPP  
All sales are subject to Omron Electronic Components LLC standard terms and conditions of sale, which  
can be found at http://www.components.omron.com/components/web/webfiles.nsf/sales_terms.html  
ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.  
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.  
OMRON ON-LINE  
Global - http://www.omron.com  
USA - http://www.components.omron.com  
OMRON ELECTRONIC  
COMPONENTS LLC  
55 E. Commerce Drive, Suite B  
Schaumburg, IL 60173  
847-882-2288  
11/12  
Specifications subject to change without notice  
Printed in USA  
Cat. No. X305-E-1b  
MEMS Gauge Pressure Sensor 2SMPP  

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