MPX2200D [MOTOROLA]
0 to 200 kPa (0 to 29 psi) 40 mV FULL SCALE SPAN (TYPICAL); 0至200千帕（ 0 〜29 psi）的40 mV的满量程（典型值）
| 型号： | MPX2200D |
| 厂家： | 
MOTOROLA |
| 描述： | 0 to 200 kPa (0 to 29 psi) 40 mV FULL SCALE SPAN (TYPICAL) |
| 文件： | 总8页 (文件大小：175K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
Order this document
by MPX2200/D
SEMICONDUCTOR TECHNICAL DATA
Motorola Preferred Device
0 to 200 kPa (0 to 29 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
The MPX2200 and MPX2201 series device is a silicon piezoresistive pressure sensor
providing a highly accurate and linear voltage output — directly proportional to the
applied pressure. The sensor is a single monolithic silicon diaphragm with the strain
gauge and a thin–film resistor network integrated on–chip. The chip is laser trimmed for
precise span and offset calibration and temperature compensation. They are designed
for use in applications such as pump/motor controllers, robotics, level indicators, medical
diagnostics, pressure switching, barometers, altimeters, etc.
Features
•
•
•
•
•
Temperature Compensated Over 0°C to +85°C
Patented Silicon Shear Stress Strain Gauge
±0.25% Linearity (MPX2200D)
Easy to Use Chip Carrier Package
Available in Absolute, Differential and Gauge Configurations
BASIC CHIP
CARRIER ELEMENT
CASE 344–15, STYLE 1
Application Examples
•
•
•
•
•
•
•
Pump/Motor Controllers
Robotics
Level Indicators
Medical Diagnostics
Pressure Switching
Barometers
Altimeters
Figure 1 illustrates a block diagram of the internal circuitry on the stand–alone
pressure sensor chip.
DIFFERENTIAL
PORT OPTION
V
S
3
CASE 344C–01, STYLE 1
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
NOTE: Pin 1 is the notched pin.
2
4
X–ducer
SENSING
ELEMENT
V
out+
PIN NUMBER
V
out–
1
2
Gnd
+V
3
4
V
S
–V
out
out
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The absolute sensor has a built–in reference vacuum. The output voltage will decrease
as vacuum, relative to ambient, is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,
output voltage increases as increasing vacuum is applied to the vacuum (P2) side
relative to the pressure (P1) side.
Preferred devices are Motorola recommended choices for future use and best overall value.
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 7
Motorola, Inc. 1997
MAXIMUM RATINGS
Rating
Symbol
Value
400
Unit
kPa
kPa
°C
(8)
Overpressure (P1 > P2)
P
max
(8)
Burst Pressure (P1 > P2)
P
burst
2000
Storage Temperature
Operating Temperature
T
stg
–40 to +125
–40 to +125
T
A
°C
OPERATING CHARACTERISTICS (V = 10 Vdc, T = 25°C unless otherwise noted, P1 > P2)
S
A
Characteristics
Symbol
Min
0
Typ
—
Max
200
16
Unit
kPa
(1)
Pressure Range
Supply Voltage
Supply Current
P
OP
V
—
—
10
Vdc
S
o
I
6.0
—
mAdc
mV
(3)
Full Scale Span
MPX2200A, MPX2200D, MPX2201D
MPX2201A
V
FSS
38.5
37.5
40
40
41.5
42.5
(4)
Offset
MPX2200A, MPX2200D
MPX2200A
MPX2201A
V
off
–1.0
–2.0
–3.0
—
—
—
1.0
2.0
3.0
mV
Sensitivity
(5)
∆V/∆P
—
0.2
—
mV/kPa
Linearity
MPX2200D
MPX2200A
MPX2201D
MPX2201A
—
–0.25
–1.0
–0.5
–2.0
—
—
—
—
0.25
1.0
0.5
2.0
%V
FSS
(5)
Pressure Hysteresis (0 to 200 kPa)
—
—
—
—
± 0.1
± 0.5
—
—
—
%V
%V
%V
FSS
FSS
FSS
(5)
Temperature Hysteresis (–40°C to +125°C)
(5)
Temperature Effect on Full Scale Span
TCV
FSS
–1.0
–1.0
1300
1400
—
1.0
1.0
2500
3000
—
(5)
Temperature Effect on Offset
TCV
off
—
mV
Input Impedance
Z
in
—
Ω
Ω
Output Impedance
Z
out
—
(6)
Response Time (10% to 90%)
Warm–Up
t
R
1.0
20
ms
ms
—
—
—
—
(9)
Offset Stability
—
±0.5
—
%V
FSS
MECHANICAL CHARACTERISTICS
Characteristics
Symbol
Min
—
Typ
2.0
—
Max
—
Unit
Grams
kPa
Weight, (Basic Element Case 344–15)
—
—
(7)
Common Mode Line Pressure
—
690
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (V
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
FSS
4. Offset (V ) is defined as the output voltage at the minimum rated pressure.
off
5. Accuracy (error budget) consists of the following:
•
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
•
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
•
•
TcSpan:
TcOffset:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
LINEARITY
Linearity refers to how well a transducer’s output follows
LEAST SQUARES FIT
EXAGGERATED
PERFORMANCE
CURVE
the equation: V
= V + sensitivity x P over the operating
out
off
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
STRAIGHT LINE
DEVIATION
LEAST
SQUARE
DEVIATION
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
END POINT
STRAIGHT LINE FIT
OFFSET
50
PRESSURE (% FULLSCALE)
100
0
Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the output characteristics of the MPX2200
series at 25°C. The output is directly proportional to the dif-
ferential pressure and is essentially a straight line.
The effects of temperature on Full Scale Span and Offset
are very small and are shown under Operating Characteristics.
V
= 10 Vdc
= 25°C
S
40
35
30
25
20
15
10
5
T
A
P1 > P2
TYP
SPAN
RANGE
(TYP)
MAX
MIN
0
–5
OFFSET
kPa
0
25
50
7.25
75
100
14.5
125
150
21.75
175
200
29
PSI
PRESSURE
Figure 3. Output versus Pressure Differential
SILICONE GEL DIFFERENTIAL/GAUGE
SILICONE GEL
DIE COAT
ABSOLUTE
DIE
STAINLESS STEEL
METAL COVER
STAINLESS STEEL
METAL COVER
DIE COAT
DIE
P1
P1
EPOXY
CASE
EPOXY
CASE
WIRE BOND
WIRE BOND
DIE
BOND
LEAD FRAME
LEAD FRAME
DIE
BOND
DIFFERENTIAL/GAUGE ELEMENT
P2
ABSOLUTE ELEMENT
P2
Figure 4. Cross–Sectional Diagrams (Not to Scale)
Figure 4 illustrates an absolute sensing die (right) and the
differential or gauge die in the basic chip carrier (Case
344–15). A silicone gel isolates the die surface and wire
bonds from the environment, while allowing the pressure sig-
nal to be transmitted to the silicon diaphragm.
teristics and internal reliability and qualification tests are
based on use of dry air as the pressure media. Media other
than dry air may have adverse effects on sensor perfor-
mance and long term reliability. Contact the factory for in-
formation regarding media compatibility in your application.
The MPX2200 series pressure sensor operating charac-
Motorola Sensor Device Data
3
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
tial pressure applied, P1 > P2. The absolute sensor is de-
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die from the environment. The differential
or gauge sensor is designed to operate with positive differen-
signed for vacuum applied to P1 side.
The Pressure (P1) side may be identified by using the
table below:
Part Number
Case Type
344–15–
344C–01
344B–01
344D–01
344E–01
344A–01
344F–01
Pressure (P1) Side Identifier
Stainless Steel Cap
MPX2200A
MPX2200D
MPX2200DP
MPX2200AP
MPX2200GVP
MPX2200AS
MPX2200GVS
MPX2200ASX
MPX2201DP
Side with Part Marking
Side with Port Attached
Stainless Steel Cap
MPX2200GP
MPX2200GS
MPX2200GSX
MPX2201GP
Side with Port Attached
Stainless Steel Cap
MPX2201GSX
Side with Port Attached
ORDERING INFORMATION
MPX2200 series pressure sensors are available in absolute, differential and gauge configurations. Devices are available in
the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose
pressure connections.
MPX Series
Device Type
Options
Case Type
Case 344–15
Order Number
Device Marking
Basic Element
Absolute, Differential
MPX2200A
MPX2200D
MPX2200A
MPX2200D
Ported Elements
Differential
Case 344C–01
Case 344B–01
MPX2200DP
MPX2201DP
MPX2200DP
MPX2201DP
Absolute, Gauge
MPX2200AP
MPX2200GP
MPX2201GP
MPX2200AP
MPX2200GP
MPX2201GP
Gauge Vacuum
Case 344D–01
Case 344E–01
MPX2200GVP
MPX2200GVP
Absolute, Gauge Stove Pipe
MPX2200AS
MPX2200GS
MPX2200A
MPX2200D
Gauge Vacuum Stove Pipe
Absolute, Gauge Axial
Case 344A–01
Case 344F–01
MPX2200GVS
MPX2200D
MPX2200ASX
MPX2200GSX
MPX2201GSX
MPX2200A
MPX2200D
MPX2201D
4
Motorola Sensor Device Data
PACKAGE DIMENSIONS
NOTES:
C
1. DIMENSIONING AND TOLERANCING PER ASME
Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
POSITIVE
PRESSURE (P1)
R
3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
M
INCHES
MILLIMETERS
B
–A–
DIM
A
B
C
D
MIN
MAX
0.630
0.534
0.220
0.020
0.064
MIN
15.11
13.06
5.08
MAX
16.00
13.56
5.59
0.595
0.514
0.200
0.016
0.048
N
L
1
2
3
4
PIN 1
0.41
0.51
–T–
F
1.22
1.63
SEATING
G
J
L
M
N
R
0.100 BSC
2.54 BSC
PLANE
0.014
0.695
0.016
0.725
0.36
0.40
G
POSITIVE
PRESSURE
(P1)
J
17.65
18.42
F
30 NOM
30 NOM
D 4 PL
0.475
0.430
0.495
0.450
12.07
10.92
12.57
11.43
M
M
0.136 (0.005)
T
A
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344–15
ISSUE W
NOTES:
PORT #2
VACUUM
PRESSURE
(P2)
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
C
A
POSITIVE
PRESSURE
(P1)
INCHES
MILLIMETERS
DIM
A
B
C
D
F
MIN
MAX
0.720
0.255
0.820
0.020
0.064
MIN
17.53
6.22
MAX
18.28
6.48
0.690
0.245
0.780
0.016
0.048
PIN 1
–B–
V
19.81
0.41
20.82
0.51
2
3
1
4
1.22
1.63
G
J
K
N
R
S
0.100 BSC
2.54 BSC
0.014
0.345
0.300
0.178
0.220
0.182
0.016
0.375
0.310
0.186
0.240
0.194
0.36
8.76
7.62
4.52
5.59
4.62
0.41
9.53
7.87
4.72
6.10
4.93
K
S
J
V
N
G
F
R
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
D 4 PL
0.13 (0.005)
SEATING
–T–
M
M
T
B
PLANE
CASE 344A–01
ISSUE B
Motorola Sensor Device Data
5
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
SEATING
PLANE
–T–
U
L
R
INCHES
MILLIMETERS
H
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.325
0.020
0.064
MIN
29.08
17.40
7.75
0.41
1.22
MAX
29.85
18.16
8.26
0.51
1.63
1.145
0.685
0.305
0.016
0.048
N
B
PORT #1
–Q–
POSITIVE
PRESSURE
(P1)
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.230
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.159
0.250
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
5.84
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
6.35
6.10
1
2
3
4
PIN 1
K
–P–
S
M
S
0.25 (0.010)
T
Q
J
F
U
0.910 BSC
23.11 BSC
G
C
D 4 PL
M
S
S
0.13 (0.005)
T
S
Q
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344B–01
ISSUE B
NOTES:
–A–
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
V
U
PORT #1
W
L
R
H
INCHES
MILLIMETERS
PORT #2
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.435
0.020
0.064
MIN
29.08
17.40
10.29
0.41
MAX
29.85
18.16
11.05
0.51
PORT #1
POSITIVE PRESSURE
(P1)
PORT #2
VACUUM
(P2)
1.145
0.685
0.405
0.016
0.048
N
–Q–
1.22
1.63
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
SEATING
PLANE
SEATING
PLANE
B
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.063
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.159
0.083
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
1.60
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
2.11
1
2
3 4
PIN 1
K
–P–
M
S
0.25 (0.010)
T
Q
–T–
–T–
S
F
J
6.10
G
C
U
V
W
0.910 BSC
23.11 BSC
D 4 PL
0.248
0.310
0.278
0.330
6.30
7.87
7.06
8.38
M
S
S
0.13 (0.005)
T
S
Q
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344C–01
ISSUE B
6
Motorola Sensor Device Data
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
U
SEATING
PLANE
INCHES
MILLIMETERS
–T–
L
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.325
0.020
0.064
MIN
29.08
17.40
7.75
0.41
1.22
MAX
29.85
18.16
8.26
0.51
1.63
PORT #2
VACUUM
(P2)
1.145
0.685
0.305
0.016
0.048
H
R
POSITIVE
PRESSURE
(P1)
N
–Q–
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.230
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.158
0.250
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
5.84
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
6.35
6.10
B
1
2
3
4
K
PIN 1
S
U
0.910 BSC
23.11 BSC
C
F
–P–
G
STYLE 1:
J
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
M
S
0.25 (0.010)
T
Q
D 4 PL
M
S
S
0.13 (0.005)
T
S
Q
CASE 344D–01
ISSUE B
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
PORT #1
POSITIVE
PRESSURE
(P1)
C
A
BACK SIDE
VACUUM
(P2)
INCHES
MILLIMETERS
DIM
A
B
C
D
F
MIN
MAX
0.720
0.255
0.820
0.020
0.064
MIN
17.53
6.22
19.81
0.41
MAX
18.28
6.48
20.82
0.51
0.690
0.245
0.780
0.016
0.048
–B–
V
3
2
4
1
1.22
1.63
PIN 1
G
J
K
N
R
S
0.100 BSC
2.54 BSC
0.014
0.345
0.300
0.178
0.220
0.182
0.016
0.375
0.310
0.186
0.240
0.194
0.36
8.76
7.62
4.52
5.59
4.62
0.41
9.53
7.87
4.72
6.10
4.93
K
S
V
J
N
G
STYLE 1:
F
R
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
D 4 PL
SEATING
PLANE
M
M
–T–
0.13 (0.005)
T B
CASE 344E–01
ISSUE B
Motorola Sensor Device Data
7
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
–T–
C
A
–Q–
E
U
INCHES
MILLIMETERS
DIM
A
B
C
D
E
F
G
J
K
N
P
Q
R
S
MIN
MAX
1.120
0.760
0.650
0.020
0.180
0.064
MIN
27.43
18.80
16.00
0.41
4.06
1.22
2.54 BSC
0.36
5.59
1.78
3.81
3.81
11.18
17.65
21.34
4.62
MAX
28.45
19.30
16.51
0.51
1.080
0.740
0.630
0.016
0.160
0.048
N
S
B
4.57
1.63
V
0.100 BSC
R
0.014
0.220
0.070
0.150
0.150
0.440
0.695
0.840
0.182
0.016
0.240
0.080
0.160
0.160
0.460
0.725
0.860
0.194
0.41
6.10
2.03
4.06
4.06
11.68
18.42
21.84
4.92
PORT #1
POSITIVE
PRESSURE
(P1)
PIN 1
–P–
M
M
0.25 (0.010)
T Q
4
3
2
1
K
U
V
F
J
G
STYLE 1:
D 4 PL
0.13 (0.005)
PIN 1. GROUND
2. V (+) OUT
3. V SUPPLY
4. V (–) OUT
M
S
S
T
P
Q
CASE 344F–01
ISSUE B
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and
specificallydisclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola
datasheetsand/orspecificationscananddovaryindifferentapplicationsandactualperformancemayvaryovertime. Alloperatingparameters,including“Typicals”
must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of
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ordeathmayoccur. ShouldBuyerpurchaseoruseMotorolaproductsforanysuchunintendedorunauthorizedapplication,BuyershallindemnifyandholdMotorola
and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees
arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that
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