S10201-04M-01 [HAMAMATSU]

CCD Sensor,;
S10201-04M-01
型号: S10201-04M-01
厂家: HAMAMATSU CORPORATION    HAMAMATSU CORPORATION
描述:

CCD Sensor,

CD 传感器 换能器
文件: 总14页 (文件大小:858K)
中文:  中文翻译
下载:  下载PDF数据表文档文件
TDI-CCD image sensors  
S10200-02-01 S10201-04-01 S10202-08-01 S10202-16-01  
Operating the back-thinned CCD in TDI mode  
delivers high sensitivity.  
TDI-CCD image sensers capture clear and bright images even under low-light-level conditions. During TDI (time delay integra-  
tion) mode, the CCD captures an image of a moving object while transferring integrated signal charges synchronously with  
the object movement. This operation mode dramatically boosts sensitivity to high levels even when capturing fast moving  
objects. Our new TDI-CCD uses the back-thinned structure to achieve even higher quantum efciency over a wide spectral  
range from UV to near IR region (200 to 1100 nm).  
Features  
Applications  
TDI mode gives high sensitivity  
Sequential imaging of high-speed moving samples  
Inspection tasks on electronic parts production line  
Semiconductor inspection  
High-speed, continuous image acquisition  
Back-thinned structure ensures high sensitivity from UV to near IR  
Multiple ports for high-speed line rate  
Low noise  
Flow cytometery  
TDI mode  
In FFT-CCD, signal charges in each line are vertically transferred during charge readout. TDI mode synchronizes this vertical  
transfer timing with the movement of the object, so that signal charges are integrated a number of times equal to the number  
of vertical stages of the CCD pixels. In the TDI mode, the signal charges must be transferred in the same direction at the same  
speed as those of the object to be imaged. These speeds are expressed by the following equation:  
v = f × d  
v: object moving speed, charge transfer speed, f: vertical transfer frequency, d: pixel size  
In the right gure, when the rst stage charges are transferred  
Schematic diagram showing integrated  
to the second stage, an additional charges are produced in the  
second stage by photoelectric conversion and accumulated.  
When this operation is continuously repeated until reaching  
the last stage M (the number of vertical stages), signal charg-  
es which are M times greater than the initial charges are accu-  
mulated. Since the signal charges on each line are output from  
the CCD horizontal shift register, a two-dimensional image can  
be continuously acquired. In this way the TDI mode achieves  
sensitivity which is M times higher than linear image sensors  
exposure by TDI mode  
Time1  
Time2  
Time3  
First stage  
·
·
·
·
·
Last stage M  
KMPDC0139EA  
(S/N is improved M times). The TDI mode also improves  
sensitivity variations compared to frame mode operation.  
Selection guide  
Number of  
total pixels  
(H × V)  
1040 × 128  
2080 × 128  
4160 × 128  
4224 × 128  
Number of  
effective pixels  
(H × V)  
1024 × 128  
2048 × 128  
4096 × 128  
4096 × 128  
1
Number of  
ports  
Pixel rate  
(MHz/port)  
Line rate  
(kHz)  
Vertical  
transfer  
Applicable  
camera  
*
Type no.  
2 3  
S10200-02-01  
S10201-04-01  
S10202-08-01  
S10202-16-01  
2
4
8
-
* *  
2 3  
50  
C10000-801  
* *  
30  
Bi-directional  
-
-
16  
100  
1: The C10000 series cameras are products manufactured by Hamamatsu Photonics, System Division (refer to page 14).  
2: Temporary window type (S10200-02N-01, S10201-04N-01) is also available upon request.  
3: Light-shield mask type (S10200-02M-01, S10201-04M-01) for horizontal register shielding is also available upon request [see device  
structure (P.7)]. The light-shield mask’s aperture size in the vertical direction is 96 pixels. The effect of the light-shield mask may  
vary depending on the wavelength of the light source in use and the incident angle of light.  
*
*
*
1
www.hamamatsu.com  
TDI-CCD image sensors  
S10200-02-01, S10201-04-01, S10202-08-01, S10202-16-01  
Structure  
Parameter  
Specification  
Pixel size (H × V)  
TDI stage  
12 × 12 μm  
128  
FW × 100 (min.)  
3 phases  
Anti-blooming  
Vertical clock  
Horizontal clock  
Output circuit  
Package  
2 phases  
Three-stage MOSFET source follower  
Ceramic DIP (refer to dimensional outlines)  
4
Window  
Quartz glass  
*
4: Resin sealing  
*
Absolute maximum ratings (Ta=25 °C)  
Parameter  
Symbol  
Topr  
Tstg  
VOD  
VRD  
VOFD  
VOFG  
VSG  
VOG  
Min.  
-50  
-50  
-0.5  
-0.5  
-0.5  
-10  
-10  
-10  
-10  
-10  
-8  
Typ.  
Max.  
60  
70  
25  
18  
18  
15  
15  
15  
15  
15  
+8  
15  
Unit  
°C  
°C  
V
V
V
V
V
V
V
5
6 7  
Operating temperature  
* * *  
-
-
-
-
-
-
-
-
-
-
-
-
7
Storage temperature  
*
Output transistor drain voltage  
Reset drain voltage  
Overflow drain voltage  
Overflow gate voltage  
Summing gate voltage  
Output gate voltage  
Reset gate voltage  
VRG  
VTG  
Transfer gate voltage  
Vertical clock voltage  
Horizontal clock voltage  
V
V
V
VP1V, VP2V, VP3V  
VP1H, VP2H  
-10  
5: Package temperature  
*
*
*
6: The chip temperature may increase due to heating in high-speed operation. We recommend taking measures to dissipate heat as needed.  
7: No condensation  
Note: Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the  
product within the absolute maximum ratings.  
Operating conditions (TDI mode, Ta=25 °C)  
Parameter  
Output transistor drain voltage  
Reset drain voltage  
Output gate voltage  
Substrate voltage  
Symbol  
VOD  
VRD  
Min.  
12  
12  
4
-
7
Typ.  
15  
14  
6
0
9
Max.  
18  
16  
8
-
11  
7
Unit  
V
V
V
V
VOG  
VDGND, VAGND  
VOFD  
Overflow drain voltage  
Overflow gate voltage  
V
V
3
5
VOFG  
High  
Low  
High  
Low  
High  
Low  
High  
Low  
High  
Low  
4
-6  
4
-6  
4
-6  
7
-6  
4
-6  
2.0  
6
-5  
6
-5  
6
-5  
8
0
6
-5  
2.2  
8
-4  
8
-4  
8
-4  
9
-
8
-4  
2.4  
VP1VH, VP2VH, VP3VH  
VP1VL, VP2VL, VP3VL  
VP1HH, VP2HH  
VP1HL, VP2HL  
VSGH  
Vertical shift register clock voltage  
Horizontal shift register clock voltage  
Summing gate voltage  
V
V
V
V
VSHL  
VRGH  
VRGL  
VTGH  
VTGL  
RL  
Reset gate voltage  
Transfer gate voltage  
V
External load resistance  
kΩ  
2
TDI-CCD image sensors  
S10200-02-01, S10201-04-01, S10202-08-01, S10202-16-01  
Electrical characteristics [Ta=25 °C, fc=30 MHz, Typ. value in operating conditions table (P.2), unless otherwise noted]  
Parameter  
Signal output frequency  
Symbol  
fc  
Min.  
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
Typ.  
30  
250  
400  
650  
50  
50  
50  
100  
50  
90  
90  
40  
60  
100  
20  
40  
40  
20  
40  
Max.  
40  
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
12  
-
Unit  
MHz  
S10200-02-01  
S10201-04-01  
S10202-08-01/-16-01  
S10200-02-01  
S10201-04-01  
S10202-08-01  
S10202-16-01  
S10200-02-01  
S10201-04-01  
S10202-08-01/-16-01  
S10200-02-01  
S10201-04-01  
S10202-08-01/-16-01  
S10200-02-01  
S10201-04-01  
S10202-08-01/-16-01  
S10200-02-01  
S10201-04-01  
S10202-08-01/-16-01  
Vertical shift register  
capacitance  
pF  
CP1V, CP2V, CP3V  
Line rate  
LR  
kHz  
Horizontal shift register  
capacitance  
pF  
pF  
pF  
pF  
CP1H, CP2H  
CTG  
Transfer gate capacitance  
Summing gate capacitance  
Reset gate capacitance  
-
-
-
-
CSG  
CRG  
-
40  
Charge transfer efficiency*8  
DC output level*9  
Output impedance*10  
CTE  
Vout  
Zo  
Ido  
P
0.99995  
0.99999  
11  
150  
8
-
V
Ω
-
-
-
-
mA  
mW/port  
Output MOSFET supply current/node  
Power consumption*9 *10  
120  
8: Charge transfer efficiency per pixel, measured at half of the full well capacity  
9: The values depend on the load resistance. (VOD=15 V, Load resistance=2.2 kΩ)  
10: Power consumption of the on-chip amplifier plus load resistance  
*
*
*
Electrical and optical characteristics [Ta=25 °C, fc=30 MHz, Typ. value in operating conditions table (P.2), unless otherwise noted]  
Parameter  
Saturation output voltage  
Symbol  
Vsat  
FW  
Sv  
DS  
Nr  
DR  
PRNU  
λ
Min.  
-
80  
8.5  
-
-
1777  
-
-
Typ.  
FW × Sv  
100  
9.5  
30  
35  
2857  
±3  
Max.  
-
120  
10.5  
100  
45  
Unit  
V
11  
-
Full well capacity  
ke  
μV/e  
*
-
CCD node sensitivity  
11 12  
-
Dark current  
e /pixel  
*
Readout noise  
Dynamic range  
*
-
e rms  
-
-
%
nm  
13  
Photoresponse nonuniformity  
±10  
-
*
Spectral response range  
200 to 1100  
11: TDI mode  
*
*
*
12: Line rate 50 kHz, accumulated dark signal after 128-stage transfer  
13: Measured at half of the full well capacity, using LED light (peak emission wavelength: 660 nm), in TDI mode  
Fixed pattern noise (peak to peak)  
Photoresponse nonuniformity (PRNU) =  
× 100 [%]  
Signal  
3
TDI-CCD image sensors  
S10200-02-01, S10201-04-01, S10202-08-01, S10202-16-01  
14  
Spectral response (without window)  
*
(Typ. Ta=25 °C)  
(Typ. Ta=25 °C)  
7000  
6000  
5000  
4000  
3000  
2000  
100  
Back-thinned CCD  
90  
80  
70  
60  
50  
40  
30  
20  
10  
0
S10200-02-01  
S10201-04-01  
S10202-08-01  
S10202-16-01  
1000  
0
Front-illuminated CCD  
200 300 400 500 600 700 800 900 1000 1100  
200 300 400 500 600 700 800 900 1000 1100  
Wavelength (nm)  
Wavelength (nm)  
KMPDB0268EB  
KMPDB0269EC  
14: Spectral response with quartz window is decreased according to the spectral transmittance characteristics of window material.  
*
Spectral transmittance characteristics of window material  
(Typ. Ta=25 °C)  
100  
80  
60  
40  
20  
0
200 300 400 500 600 700 800 900 1000  
Wavelength (nm)  
KMPDB0303EA  
4
TDI-CCD image sensors  
S10200-02-01, S10201-04-01, S10202-08-01, S10202-16-01  
Sensor structure  
S10200-02-01  
B port side  
TGb  
P3V  
P2V  
P1V  
TGa  
OFD  
OFG  
Bidirectional transfer  
512 pixels  
DGND  
A port side  
KAPDC0251EA  
S10201-04-01  
B port side  
TGb  
P3V  
P2V  
OFD  
OFG  
Bidirectional transfer  
512 pixels  
DGND  
P1V  
TGa  
A port side  
KMPDC0260EA  
5
TDI-CCD image sensors  
S10200-02-01, S10201-04-01, S10202-08-01, S10202-16-01  
S10202-08-01  
B port side  
TGb  
P3V  
P2V  
P1V  
TGa  
OFD  
OFG  
Bidirectional transfer  
512 pixels  
DGND  
A port side  
KMPDC0261EA  
S10202-16-01  
B port side  
TGb  
P3V  
P2V  
P1V  
TGa  
OFD  
OFG  
DGND  
Bidirectional  
transfer  
256 pixels  
A port side  
KMPDC0262EA  
6
TDI-CCD image sensors  
S10200-02-01, S10201-04-01, S10202-08-01, S10202-16-01  
Device structure (typical example: S10202-08-01, conceptual drawing of top view)  
Thinning  
8 blank pixels  
V=128  
H=512 × 8 (number of ports)  
512 pixels  
Note: When viewed from the direction of the incident light, the horizontal shift register is covered with a thick silicon layer (dead layer). However,  
long-wavelength light passes through the silicon dead layer and may possibly be detected by the horizontal shift register. To prevent this,  
provide light shield on that area as needed.  
KMPDC0252EB  
7
TDI-CCD image sensors  
S10200-02-01, S10201-04-01, S10202-08-01, S10202-16-01  
Timing chart  
A port side readout  
OSb  
RGb HL  
P2Hb, SGb HL  
P1Hb HL  
Tprv, Tpwv, Tpfv  
Tovrv  
Tovrv  
TGb HL  
P1V HL  
P2V HL  
P3V HL  
TGa HL  
Tprh, Tpwh, Tpfh  
Tovr  
Tprs, Tpws, Tpfs  
S10200-02-01, S10201-04-01, S10202-08-01: 518  
S10202-16-01: 262  
519  
263  
520  
264  
3
3
4..517  
4..261  
1
2
P1Ha HL  
P2Ha, SGa HL  
Tprr, Tpwr, Tpfr  
RGa HL  
OSa  
S510 S511 S512 : S10200-02-01, S10201-04-01, S10202-08-01  
S254 S255 S256 : S10202-16-01  
D1  
D2  
D3..D8, S1..S509  
D3..D8, S1..S253  
KMPDC0254EG  
B port side readout  
OSb  
S510 S511 S512 : S10200-02-01, S10201-04-01, S10202-08-01  
S254 S255 S256 : S10202-16-01  
D1  
D2  
D3..D8, S1..S509  
D3..D8, S1..S253  
Tprr, Tpwr, Tpfr  
RGb H  
L
Tprs, Tpws, Tpfs  
P2Hb, SGb H  
L
Tovr  
Tprh, Tpwh, Tpfh  
S10200-02-01, S10201-04-01, S10202-08-01: 518  
S10202-16-01: 262  
519  
263  
520  
264  
3
3
4 ..517  
4 ..261  
1
2
P1Hb H  
L
Tprv, Tpwv, Tpfv  
TGb H  
L
P1V H  
L
P2V H  
L
P3V H  
L
Tovrv  
Tovrv  
TGa H  
L
P1Ha H  
L
P2Ha, SGa H  
L
RGa H  
L
OSa  
KMPDC0253EH  
8
TDI-CCD image sensors  
S10200-02-01, S10201-04-01, S10202-08-01, S10202-16-01  
Parameter  
Symbol  
Tpwv  
Tprv, Tpfv  
Tovrv  
Tpwh  
Tprh, Tpfh  
-
Tpws  
Tprs, Tpfs  
-
Tpwr  
Tprr, Tpfr  
Tovr  
Min.  
120  
2
30  
12.5  
3
Typ.  
770  
10  
300  
16.5  
6
50  
16.5  
4
Max.  
Unit  
ns  
ns  
ns  
ns  
ns  
%
ns  
ns  
%
ns  
ns  
ns  
Pulse width  
Rise and fall times  
Overlap time  
Pulse width*15  
Rise and fall times*15  
Duty ratio*15  
Pulse width  
Rise and fall times  
Duty ratio  
Pulse width  
Rise and fall times  
Overlap time  
-
-
-
-
-
-
-
-
-
-
-
-
P1V, 2V, 3V, TG  
P1H, P2H  
SG  
-
12.5  
2
-
5
1
50  
6
2
RG  
TG - P1H  
30  
1000  
15: Symmetrical clock pulses should be overlapped at 50% of maximum pulse amplitude.  
*
Dimensional outlines (unit: mm)  
S10200-02-01  
30.48 0.35  
27.94 0.33  
Window glass 23.84 0.1  
Photosensitive area 12.288  
3.44 0.35  
2.84 0.3  
40  
21  
20  
C0.5  
1
Index mark  
1.48 0.15*  
0.457 0.05  
1.27 0.1  
* Distance from upper surface of window to photosensitive surface  
KMPDA0218EC  
9
TDI-CCD image sensors  
S10200-02-01, S10201-04-01, S10202-08-01, S10202-16-01  
S10201-04-01  
40.64 0.45  
38.1 0.43  
Window glass 33 0.1  
3.44 0.35  
2.84 0.3  
Photosensitive area 24.576  
40  
21  
20  
C0.5  
1
Index mark  
1.48 0.15*  
0.457 0.05  
1.27 0.1  
* Distance from upper surface of window to photosensitive surface  
KMPDA0219EC  
S10202-08-01, S10202-16-01  
66.04 0.66  
63.5 0.64  
3.8 0.38  
Window glass 55 0.1  
Photosensitive area 49.152  
2.4 0.24  
0.8 0.05  
100  
51  
50  
C0.5  
1
2.42 0.2*  
Index mark  
1.27 0.13  
0.42 0.25  
* Distance from upper surface of window to photosensitive surface  
KMPDA0220EC  
10  
TDI-CCD image sensors  
S10200-02-01, S10201-04-01, S10202-08-01, S10202-16-01  
Pin connections  
S10200-02-01  
Function  
S10201-04-01  
Pin no. Symbol  
Remark Pin no. Symbol  
Function  
Remark  
1
2
3
4
P2V CCD vertical register clock-2  
P3V CCD vertical register clock-3  
P1V CCD vertical register clock-1  
TGa Transfer gate-a  
1
2
3
4
P2V CCD vertical register clock-2  
P3V CCD vertical register clock-3  
P1V CCD vertical register clock-1  
TGa Transfer gate-a  
5
SSD Digital GND  
GND  
5
SSD Digital GND  
GND  
6
7
NC  
No connection  
6
7
OSa1 Output transistor source-a1  
SSA Analog GND  
RL=2.2 kΩ  
GND  
SSA Analog GND  
GND  
8
9
OSa1 Output transistor source-a 1  
OD1 Output drain-1  
8
9
OSa2 Output transistor source-a2  
OD1 Output drain-1  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
10  
11  
12  
13  
14  
15  
16  
17  
18  
19  
20  
21  
22  
23  
24  
25  
26  
27  
28  
29  
30  
31  
32  
33  
34  
35  
36  
37  
38  
39  
40  
OSa2 Output transistor source-a 2  
10  
11  
12  
13  
14  
15  
16  
17  
18  
19  
20  
21  
22  
23  
24  
25  
26  
27  
28  
29  
30  
31  
32  
33  
34  
35  
36  
37  
38  
39  
40  
OSa3 Output transistor source-a3  
OD3 Output drain-3  
OSa4 Output transistor source-a4  
RL=2.2 kΩ  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+6 V  
+14 V  
+9 V  
NC  
NC  
OG  
RD  
No connection  
No connection  
Output gate  
Reset drain  
+6 V  
+14 V  
+9 V  
GND  
OG  
RD  
Output gate  
Reset drain  
OFD Overflow drain  
SSD Digital GND  
RGa Reset gate-a  
SGa Summing gate-a  
P1Ha CCD horizontal register-a clock-1  
P2Ha CCD horizontal register-a clock-2  
P2Hb CCD horizontal register-b clock-2  
P1Hb CCD horizontal register-b clock-1  
SGb Summing gate-b  
OFD Overflow drain  
SSD Digital GND  
RGa Reset gate-a  
SGa Summing gate-a  
P1Ha CCD horizontal register-a clock-1  
P2Ha CCD horizontal register-a clock-2  
P2Hb CCD horizontal register-b clock-2  
P1Hb CCD horizontal register-b clock-1  
SGb Summing gate-b  
GND  
RGb Reset gate-b  
SSD Digital GND  
OFG Overflow gate  
RGb Reset gate-b  
SSD Digital GND  
OFG Overflow gate  
GND  
GND  
+5 V  
+14 V  
+6 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
GND  
RL=2.2 kΩ  
GND  
+5 V  
+14 V  
+6 V  
RD  
OG  
NC  
NC  
Reset drain  
RD  
OG  
Reset drain  
Output gate  
Output gate  
No connection  
No connection  
OSb4 Output transistor source-b4  
OD4 Output drain-4  
OSb3 Output transistor source-b3  
OD2 Output drain-2  
OSb2 Output transistor source-b2  
SSA Analog GND  
OSb1 Output transistor source-b1  
SSD Digital GND  
OSb2 Output transistor source-b2  
OD2 Output drain-2  
OSb1 Output transistor source-b1  
SSA Analog GND  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
GND  
NC  
No connection  
SSD Digital GND  
TGb Transfer gate-b  
P1V CCD vertical register clock-1  
P3V CCD vertical register clock-3  
P2V CCD vertical register clock-2  
GND  
TGb Transfer gate-b  
P1V CCD vertical register clock-1  
P3V CCD vertical register clock-3  
P2V CCD vertical register clock-2  
11  
TDI-CCD image sensors  
S10200-02-01, S10201-04-01, S10202-08-01, S10202-16-01  
S10202-08-01  
Remark Pin no. Symbol  
Pin no. Symbol  
1
2
3
Function  
P1Ha1 CCD horizontal register-a1 clock-1  
P2Ha1 CCD horizontal register-a1 clock-2  
SGa1 Summing gate-a1  
RGa1 Reset gate-a1  
Function  
Remark  
51  
52  
53  
54  
55  
56  
57  
58  
59  
60  
61  
62  
63  
64  
65  
66  
67  
68  
69  
70  
71  
72  
73  
74  
75  
76  
77  
78  
79  
80  
81  
82  
83  
84  
85  
86  
87  
88  
89  
90  
91  
92  
93  
94  
95  
96  
97  
98  
99  
100  
P1Hb2 CCD horizontal register-b2 clock-1  
P2Hb2 CCD horizontal register-b2 clock-2  
SGb2 Summing gate-b2  
RGb2 Reset gate-b2  
SSD Digital GND  
SSA Analog GND  
OFG Overflow gate  
NC  
OFD Overflow drain  
OSb8 Output transistor source-b8  
4
5
SSD Digital GND  
GND  
GND  
+6 V  
RL=2.2 kΩ  
+9 V  
GND  
GND  
+5 V  
6
SSA Analog GND  
7
OFG Overflow gate  
8
9
OSa1 Output transistor source-a1  
OFD Overflow drain  
No connection  
+9 V  
RL=2.2 kΩ  
+14 V  
10  
11  
12  
13  
14  
15  
16  
17  
18  
19  
20  
21  
22  
23  
24  
25  
26  
27  
28  
29  
30  
31  
32  
33  
34  
35  
36  
37  
38  
39  
40  
41  
42  
43  
44  
45  
46  
47  
48  
49  
50  
NC  
RD  
No connection  
Reset drain  
+14 V  
RL=2.2 kΩ  
+6 V  
RD  
NC  
OG  
Reset drain  
No connection  
Output gate  
OSa2 Output transistor source-a2  
OG  
NC  
OD1 Output drain-1  
OSa3 Output transistor source-a3  
Output gate  
No connection  
+6 V  
RL=2.2 kΩ  
OSb7 Output transistor source-b7  
NC  
NC  
OD8 Output drain-8  
OSb6 Output transistor source-b6  
+15 V  
RL=2.2 kΩ  
No connection  
No connection  
NC  
NC  
No connection  
No connection  
+15 V  
RL=2.2 kΩ  
OD3 Output drain-3  
OSa4 Output transistor source-a4  
NC  
NC  
SSD Digital GND  
TGa Transfer gate-a  
P2V CCD vertical register clock-2  
P3V CCD vertical register clock-3  
P1V CCD vertical register clock-1  
SSD Digital GND  
OSa5 Output transistor source-a5  
OD5 Output drain-5  
+15 V  
RL=2.2 kΩ  
NC  
NC  
No connection  
No connection  
No connection  
No connection  
OD6 Output drain-6  
OSb5 Output transistor source-b5  
SSD Digital GND  
P1V CCD vertical register clock-1  
P3V CCD vertical register clock-3  
P2V CCD vertical register clock-2  
TGb Transfer gate-b  
SSD Digital GND  
NC  
NC  
OSb4 Output transistor source-b4  
OD4 Output drain-4  
NC  
NC  
OSb3 Output transistor source-b3  
OD2 Output drain-2  
NC  
OG  
OSb2 Output transistor source-b2  
RD  
NC  
OFD Overflow drain  
OSb1 Output transistor source-b1  
OFG Overflow gate  
SSA Analog GND  
SSD Digital GND  
+15 V  
RL=2.2 kΩ  
GND  
GND  
GND  
RL=2.2 kΩ  
+15 V  
GND  
No connection  
No connection  
NC  
NC  
No connection  
No connection  
RL=2.2 kΩ  
+15 V  
OSa6 Output transistor source-a6  
OD7 Output drain-7  
NC  
NC  
No connection  
No connection  
RL=2.2 kΩ  
+15 V  
No connection  
No connection  
RL=2.2 kΩ  
+15 V  
OSa7 Output transistor source-a7  
No connection  
Output gate  
RL=2.2 kΩ  
+6 V  
OG  
NC  
RD  
Output gate  
No connection  
Reset drain  
+6 V  
RL=2.2 kΩ  
+14 V  
+14 V  
RL=2.2 kΩ  
+9 V  
Reset drain  
No connection  
OSa8 Output transistor source-a8  
OFD Overflow drain  
NC  
OFG Overflow gate  
SSA Analog GND  
SSD Digital GND  
RGa2 Reset gate-a2  
SGa2 Summing gate-a2  
P2Ha2 CCD horizontal register-a2 clock-2  
P1Ha2 CCD horizontal register-a2 clock-1  
+9 V  
RL=2.2 kΩ  
+5 V  
GND  
GND  
No connection  
+5 V  
GND  
GND  
RGb1 Reset gate-b1  
SGb1 Summing gate-b1  
P2Hb1 CCD horizontal register-b1 clock-2  
P1Hb1 CCD horizontal register-b1 clock-1  
12  
TDI-CCD image sensors  
S10200-02-01, S10201-04-01, S10202-08-01, S10202-16-01  
S10202-16-01  
Remark Pin no. Symbol  
Pin no. Symbol  
1
2
3
Function  
P1Ha1 CCD horizontal register-a1 clock-1  
P2Ha1 CCD horizontal register-a1 clock-2  
SGa1 Summing gate-a1  
Function  
Remark  
51  
52  
53  
54  
55  
56  
57  
58  
59  
60  
61  
62  
63  
64  
65  
66  
67  
68  
69  
70  
71  
72  
73  
74  
75  
76  
77  
78  
79  
80  
81  
82  
83  
84  
85  
86  
87  
88  
89  
90  
91  
92  
93  
94  
95  
96  
97  
98  
99  
100  
P1Hb2 CCD horizontal register-b2 clock-1  
P2Hb2 CCD horizontal register-b2 clock-2  
SGb2 Summing gate-b2  
RGb2 Reset gate-b2  
SSD Digital GND  
SSA Analog GND  
OFG Overflow gate  
OSb16 Output transistor source-b16  
OFD Overflow drain  
OSb15 Output transistor source-b15  
RD  
OSb14 Output transistor source-b14  
OG Output gate  
OSb13 Output transistor source-b13  
OD16 Output drain-16  
OSb12 Output transistor source-b12  
OD15 Output drain-15  
OSb11 Output transistor source-b11  
OD12 Output drain-12  
OSb10 Output transistor source-b10  
OD11 Output drain-11  
OSb9 Output transistor source-b9  
SSD Digital GND  
P1V CCD vertical register clock-1  
P3V CCD vertical register clock-3  
P2V CCD vertical register clock-2  
TGb Transfer gate-b  
SSD Digital GND  
OSb8 Output transistor source-b8  
OD8 Output drain-8  
OSb7 Output transistor source-b7  
OD7 Output drain-7  
OSb6 Output transistor source-b6  
OD4 Output drain-4  
OSb5 Output transistor source-b5  
OD3 Output drain-3  
OSb4 Output transistor source-b4  
OG  
OSb3 Output transistor source-b3  
RD Reset drain  
OSb2 Output transistor source-b2  
OFD Overflow drain  
OSb1 Output transistor source-b1  
OFG Overflow gate  
SSA Analog GND  
SSD Digital GND  
RGb1 Reset gate-b1  
SGb1 Summing gate-b1  
P2Hb1 CCD horizontal register-b1 clock-2  
P1Hb1 CCD horizontal register-b1 clock-1  
4
RGa1 Reset gate-a1  
5
SSD Digital GND  
GND  
GND  
+5 V  
RL=2.2 kΩ  
+9 V  
RL=2.2 kΩ  
+14 V  
RL=2.2 kΩ  
+6 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
GND  
GND  
GND  
+5 V  
RL=2.2 kΩ  
+9 V  
RL=2.2 kΩ  
+14 V  
RL=2.2 kΩ  
+6 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
GND  
6
SSA Analog GND  
7
OFG Overflow gate  
8
9
OSa1 Output transistor source-a1  
OFD Overflow drain  
10  
11  
12  
13  
14  
15  
16  
17  
18  
19  
20  
21  
22  
23  
24  
25  
26  
27  
28  
29  
30  
31  
32  
33  
34  
35  
36  
37  
38  
39  
40  
41  
42  
43  
44  
45  
46  
47  
48  
49  
50  
OSa2 Output transistor source-a2  
RD  
OSa3 Output transistor source-a3  
OG Output gate  
OSa4 Output transistor source-a4  
OD1 Output drain-1  
OSa5 Output transistor source-a5  
OD2 Output drain-2  
OSa6 Output transistor source-a6  
OD5 Output drain-5  
OSa7 Output transistor source-a7  
OD6 Output drain-6  
OSa8 Output transistor source-a8  
SSD Digital GND  
Reset drain  
Reset drain  
TGa Transfer gate-a  
P2V CCD vertical register clock-2  
P3V CCD vertical register clock-3  
P1V CCD vertical register clock-1  
SSD Digital GND  
OSa9 Output transistor source-a9  
OD9 Output drain-9  
OSa10 Output transistor source-a10  
OD10 Output drain-10  
OSa11 Output transistor source-a11  
OD13 Output drain-13  
OSa12 Output transistor source-a12  
OD14 Output drain-14  
OSa13 Output transistor source-a13  
OG  
OSa14 Output transistor source-a14  
RD Reset drain  
OSa15 Output transistor source-a15  
OFD Overflow drain  
OSa16 Output transistor source-a16  
OFG Overflow gate  
SSA Analog GND  
SSD Digital GND  
RGa2 Reset gate-a2  
SGa2 Summing gate-a2  
P2Ha2 CCD horizontal register-a2 clock-2  
P1Ha2 CCD horizontal register-a2 clock-1  
GND  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+6 V  
RL=2.2 kΩ  
+14 V  
RL=2.2 kΩ  
+9 V  
GND  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+15 V  
RL=2.2 kΩ  
+6 V  
RL=2.2 kΩ  
+14 V  
RL=2.2 kΩ  
+9 V  
Output gate  
Output gate  
RL=2.2 kΩ  
+5 V  
GND  
RL=2.2 kΩ  
+5 V  
GND  
GND  
GND  
13  
TDI-CCD image sensors  
S10200-02-01, S10201-04-01, S10202-08-01, S10202-16-01  
Precautions (Electrostatic countermeasures)  
Handle these sensors with bare hands or wearing cotton gloves. In addition, wear anti-static clothing or use a wrist band with an earth  
ring, in order to prevent electrostatic damage due to electrical charges from friction.  
Avoid directly placing these sensors on a work-desk, etc. that may carry an electrostatic charge.  
Provide ground lines or ground connection with the work-oor, work-desk and work-bench to allow static electricity to discharge.  
Ground the tools used to handle these sensors, such as tweezers and soldering irons.  
It is not always necessary to provide all the electrostatic measures stated above. Implement these measures according to the amount of  
damage that occurs.  
Related information  
www.hamamatsu.com/sp/ssd/doc_en.html  
Precautions  
Disclamer  
Image sensors/Precautions  
TDI camera C10000 series  
The TDI camera C10000 series is useful in a wide range of imaging applications that require both  
high speed and high sensitivity, including in-line monitoring and inspection.  
Product information  
www.hamamatsu.com/all/en/C10000-801.html  
C10000-801 (With S10201-04-01)  
Electrical and optical characteristics listed in the datasheet are the values when used under typical operating conditions. We recommend using the  
product under typical operating conditions. Product characteristics vary with operating conditions. Operating conditions specied in the datasheet show  
the adjustment range. They must be adjusted within the specied range.  
Information described in this material is current as of July, 2015.  
Product specifications are subject to change without prior notice due to improvements or other reasons. This document has been carefully prepared and the  
information contained is believed to be accurate. In rare cases, however, there may be inaccuracies such as text errors. Before using these products, always  
contact us for the delivery specification sheet to check the latest specifications.  
The product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovered and reported to us within that  
one year period. However, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product use.  
Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission.  
www.hamamatsu.com  
HAMAMATSU PHOTONICS K.K., Solid State Division  
1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184  
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218  
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 8152-375-0, Fax: (49) 8152-265-8  
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10  
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777  
North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 16440 Kista, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01  
Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39) 02-93581733, Fax: (39) 02-93581741  
China: Hamamatsu Photonics (China) Co., Ltd.: B1201, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86) 10-6586-6006, Fax: (86) 10-6586-2866  
14  
Cat. No. KMPD1098E09 Jul. 2015 DN  

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