1-100012 [ETC]
SENSOR DIFFERENTIAL PRESSURE ; 传感器差压\n
| 型号： | 1-100012 |
| 厂家： | 
ETC |
| 描述： | SENSOR DIFFERENTIAL PRESSURE
|
| 文件： | 总12页 (文件大小：643K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
ASP1400
Bidirectional Differential
Pressure Meter
_ Ultra low differential pressure from
100 Pa down to 0.002 Pa
_ Zero drift & offset free
_ Outstanding accuracy and resolution
_ Ultra fast response time
_ Fully calibrated & temperature compensated
_ Digital output signal
Preliminary Information as of October 2001
ASP1400 Product Summary
The ASP1400 differential pressure sensor is especially
suited for measurements of ultra low pressure
differences of gases and true mass flow measurements
in bypass solutions.
Mounted in rugged, chemically inert PBT housing the
ASP1400 is suitable for a wide range of applications.
Such include for example monitoring of clean room
conditions, intrusion detection and almost unlimited
bypass solutions in process control, building control as
well as medical applications.
The micro-machined silicon sensor element of the
ASP1400 enables extremely long term stable and offset
free measurements. Its leading performance is based on
SENSIRION’s unsurpassed CMOSens™ technology.
With CMOSens™, the on-chip sensor element forms an
integrated whole with the amplification and A/D converter
circuit. This results in superior resolution, fast response
time and large dynamic range at lowest power
consumption.
Bypass solutions allow a true mass flow measurement.
The sensor housing provides two inlets for measuring
the differential pressure and withstands overpressures of
2 bar (29 psi).
The ASP1400 requires a supply voltage of 7…18Vdc
and provides an RS-232 and SPI compliant electrical
interface.
All measurement data is fully calibrated and temperature
compensated by means of an internal micro controller.
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Figure 1: Block Diagram ASP1400 Differential Pressure Sensor with CMOSens™ technology
www.sensirion.com
Sensirion AG, Eggbühlstr. 14, 8052 Zürich, Switzerland, Tel: +41 1 306 40 00, Fax: +41 1 306 40 30
ASP1400 Bidirectional Differential Pressure Meter
Introductory Description
Combining solid state sensor technology and
commercial IC fabrication, the ASP1400 dynamic
differential pressure sensor produced by SENSIRION
provides unbeatable performance at very low cost.
The lowest detectable differential pressure is 0.002
Pa, which corresponds to a force of only 0.00002g per
terminal software. The serial peripheral interface (SPI)
also simplifies the use of the ASP1400 in smaller
systems. If a special interface such as 4-20 mA
current output or other is required, please contact
SENSIRION for a customer specific solution.
In general, differential pressures of all gas types can
be measured using the ASP1400 product. Calibration
is done for dry air. Please contact SENSIRION, if you
would like to use the sensor for applications with other
gases.
2
cm or a geographic height difference of only 0.16
mm. Covering at the same time a differential pressure
range of more than 4 orders of magnitude, the
ASP1400 sets a new standard wherever dynamic
differential pressure has to be measured or controlled.
The ASP1400 device measures the differential
To get you started quickly, an evaluation package
including ASP1400 devices, software, cables, rubber
hose and bypass is available from SENSIRION.
(1)
pressure with a dynamic principle . The differential
pressure induces a small gas flow through a tube of
1mm diameter. SENSIRION’s unique CMOSens™
technology provides an extremely precise
measurement of this gas flow even for very small
differential pressures. In addition, the sensor signal is
almost offset free and highly long term stable. You
simply connect the gas differential pressure to be
measured to the ASP1400 device to get an
instantaneous differential pressure at a sampling rate
of up to 7Hz (please contact us for sampling rates of
up to 200Hz). The ASP1400 withstands
overpressures up to 2 bar without any loss in
precision.
(1)
Please note that a small gas flow through the
sensor is inherent in the dynamic measurement
principle. Thus, the ASP1400 is not suitable for
applications where no gas flow is allowed.
CMOSens sensor technology
CMOSens is the base technology for all Sensirion
multi sensor modules and sensor systems. The
unification of semiconductor chip and sensor
technology serves as a platform for highly integrated
system solutions with excellent sensor precision and
reliability. With CMOSens, the on-chip sensor
element forms an integrated whole with the high-end
amplification and A/D converter circuit. Due to the
compact single-chip design, CMOSens based
sensors are very resistant to electromagnetic
disturbances (EMC), another important technical
advantage of this state of the art sensor technology.
As a result, CMOSens based multi sensor modules
offer an excellent sensor precision, a fast response
time and a very large dynamic measurement range. In
addition, the digital intelligence of the CMOSens
sensor technology enables digital interfaces that
permit an easy link with the system of the customer, a
real advantage and benefit that results in ready-to-use
problem solutions (“Mount&Sense”).
Please note that absolute pressure (see section 1.4)
and gas composition have to be well-known to
achieve measurements of highest accuracy.
The ASP1400 differential pressure sensor allows an
easy realization of high precision bypass solutions for
true mass flow measurements. It has to be pointed
out that the ASP1400 is based on the successful
ASF1400 mass flow sensor. It measures differential
pressure indirectly with the mass flow, which is
generated through the applied differential pressure.
Unlike with static differential pressure sensors, you
therefore profit in bypass solutions directly from a true
mass flow measurement.
In addition to differential pressure, the ASP1400
device also provides information about the
temperature on the CMOSens™ sensor chip. Both
differential pressure and temperature data are
accessed through an RS-232 or SPI interface. The
RS-232 interface allows you to connect the ASP1400
device directly to a PC or PDA using standard
www.sensirion.com
September 2001 Preliminary Information
2/12
ASP1400 Bidirectional Differential Pressure Meter
1 Dynamic Differential Pressure Sensor Performance
Table 1: Overview ASP1400 Gas Sensor Performance
Parameter
Condition
Minimum Typical Maximum
Units
Differential Pressure
Principle of measurement
Dynamic mass flow generated by differential pressure
direct measurement
customer specific solutions
< 1 Pa
-100
100
Pa
Pa
Pa
Dynamic Range
< 3500
0.002
Gas
Lowest Detectable Pressure
Medium
Calibration gas
no liquids
(1)
Dry air
0.04
∆p ≈ 100 Pa, pabs=1.013
Pa
bar
Resolution
0.001
Pa
∆p < 1 Pa, pabs=1.013 bar
Overpressure Resistance
2
bar
(2)
(3)
Gas Flow
air, 100 Pa diff. pressure
Range 0.5 Pa to 100 Pa
0.4
ln/min
(4)
0.002% FS
Repeatability
0.08 % m.V.
(5)
0.05 % FS
Accuracy
Offset
dry air / 20 C / 966 mbar
1.5 % m.V.
0.004
20°C
0.02
1280
% FS
ms
depends on resolution
setting
(6)
Response Time
142
(see Section 3, Table 2)
Operating Temperature
0 [32]
70 [158]
°C [°F]
% FS / °C
% m.V. / °C
Zero
Span
< 0.002
< 0.09
Ambient Temperature
Coefficient
Position sensitivity
(inclination)
pabs=1 bar, small air flow
±0.004
% FS
(7)
Temperature Sensor
Measures temperature inside the sensor, but not of the surrounding air
Dynamic Range
Resolution
0
70
°C
°C
°C
0.1
2
Accuracy
3
Note: All data for dry air at 20°C and 966 mbar unless otherwise noted.
(1)
Contact us for other gases
(2)
Due to dynamic measurement principle (see Figure 4)
(3)
1 ln/min = 1 norm liter per minute = 1 liter/min at 0°C and p = 1013.25 mbar
(4)
Error = % of full scale (FS) or % of measured value, whichever is bigger.
(5)
Accuracy:
0.05 % of full scale (FS) for measured values between 0-3.3% of full scale (i.e. 0-3.3 Pa) and
1.5 % of measured value (m.V.) for measured values between 3.3-100% of full scale (i.e. 3.3-100 Pa)
(6)
(7)
For faster response times please contact SENSIRION for information about the ASP1430 differential pressure
sensor.
The sensors warms up by about 7°C (depending on supply voltage and ventilation).
www.sensirion.com
September 2001 Preliminary Information
3/12
ASP1400 Bidirectional Differential Pressure Meter
1.1 Differential Pressure Characteristics
1.3 Gas Flow and Pressure Difference
Figure 2 shows the differential pressure vs. the digital
output of the ASP1400.
The ASP1400 is calibrated for differential pressure
measurements. However, there is a well defined
relation between pressure drop and mass flow. This
relationship is shown in Figure 4. On request the
ASP1400 can also be calibrated to measure mass
flow instead of differential pressure (for more details
refer to the documentation of the SENSIRION Mass
Flow Meter ASF1400).
100
0
-100
400
200
0
-100
0
100
Differential pressure applied [Pa]
Figure 2: ASP1400 transfer characteristics.
1.2 Sensor Principle and Gas Types
The ASP1400 device measures differential pressure
indirectly. The sensor effectively uses a calorimetric
method, where fluid motion is converted into thermal
information. A heating resistor on a thermally
insulated membrane is kept above ambient
temperature. In the presence of gas flow, the
temperature distribution up- and downstream is
disturbed. This asymmetry is then measured. Due to
the minimal thermal mass of the membrane,
symmetrical arrangement, and accurate temperature
measurement, the revolutionary specifications of the
ASP1400 devices are achieved.
-200
-400
-100
-50
0
50
100
Differential pressure [Pa]
Figure 4: Differential Pressure vs. Mass Flow of
ASP1400 device.
1.4 High Precision Differential Pressure
Measurement in Bypass solutions
The ASP1400 differential pressure sensor is
exceptionally well suited in conjunction with customer
specific bypass configurations (see Figure 5).
SENSIRION’s expertise in packaging and flow
measurement combined with the accurate low
differential pressure measurement ability of the
ASP1400, enables the design of novel bypass
solutions over a wide dynamic range. In bypass
applications, the ASP1400 can be calibrated for true
mass flow measurements through the whole system.
A tube with flow restrictor and all required connection
items are included in the Differential Pressure Sensor
Evaluation Kit ASP1400 EK-P1, also available from
SENSIRION AG.
The above mentioned thermal principle requires
information about the gas type to be measured. The
standard ASP1400 is calibrated for differential
pressure measurements of dry air. Please contact
SENSIRION, if you would like to use the sensor for
applications with other gases.
In Figure 3 the repeatability of the ASP1400 devices
is compared with the repeatability of a typical
differential pressure sensor. It emphasizes the
superior performance of the ASP1400 device.
0.5
0.4
Repeatability of
typical Differential
Pressure Sensor
0.3
0.2
Repeatability of
ASP1400
Flow restrictor
0.1
0.0
Figure 5: ASP1400 device using
a bypass
0
25
50
75
100
configuration. Shown tube with flow restrictor is
included in the EK-P1 evaluation kit.
Differential Pressure [Pa]
Figure 3: Comparison of the repeatability of the
ASP1400 CMOSens™ sensor with
differential pressure sensor.
a typical
www.sensirion.com
September 2001 Preliminary Information
4/12
ASP1400 Bidirectional Differential Pressure Meter
blocks, each consists of one byte. The MSB “most
significant bit” (bit 23) is sent first.
2 Pins and Digital Interface
Since the calibrated differential pressure and
temperature output values of the ASP1400 sensor
have floating point precision, the transmitted integer
data is multiplied with an SPI factor. This factor is
100. Example: a received differential pressure SPI
value of +1234 corresponds to a differential pressure
of 12.34 Pa. Figure 7 shows the internal setup of the
SPI inter-face lines and Figure 8 an example of
cascading four ASP1400 devices using a single
microcontroller.
TxD
RxD
SCK
MISO
MOSI
/CS
VDD
GND
Figure 6: ASP1400 pin out.
Note:
GND and VDD (Power Supply)
With each additional sensor the capacitive load will
increase, causing an increase of the output fall/rise
time and an output signal deterioration.
The ASP1400 requires a voltage supply of between 7
V and 18 V. Since this voltage is internally regulated,
there are no stringent requirements as far as ripple
and stability are concerned.
2.1 RS-232 Interface
All configurations (see also Section 3) for the
ASP1400 can be set using its RS-232 interface. To
communicate with the ASP1400 via RS-232 the
following pins are required:
RxD
TxD
(Receiving Data Line)
(Transmitting Data Line)
(Ground)
Figure 7: Internal ASF1400 SPI hardware.
GND
The RS-232 of the ASP1400 is configured as follows:
Baudrate
Data Bits
Stop Bits
Parity
9600
8
1
none
none
Protocol
With these settings, the ASP1400 device can be
connected to any PC or PDA equipped with terminal
software.
The measurement values are provided as a signed
floating point number together with the corresponding
unit (Pa for differential pressure, C for temperature).
In case of an overflow, the output shows oF.
2.2 Serial Peripheral Interface (SPI)
To make measurement data available also for smaller
systems or to cascade several ASP1400 devices, the
ASP1400 provides a uni-directional SPI interface.
The configuration of the ASP1400 (as described in
Section 3) has to be done using the RS-232 port. The
SPI interface provides the measurement data as a 24
bit signed integer, where bit 0…22 defines the value
and bit 23 the sign (0 indicates the positive, and a 1
the negative sign). The 24 bits are transmitted in 3
Figure 8: Cascading four ASF1400 devices using the
SPI interface.
www.sensirion.com
September 2001 Preliminary Information
5/12
ASP1400 Bidirectional Differential Pressure Meter
SCK (Serial Clock, Output)
The SCK synchronizes data transfer out of the device
through the MOSI line. Data on the MOSI pin is ready
after a falling edge of SCK (see Figure 9 and 10 for
details).
/CS
(Chip Select, Input or Output)
There are two SPI modes, namely the PUSH and the
GET mode. In PUSH mode the /CS pin is controlled
by the ASP1400 device which behaves like a master.
Low going /CS announces a new data transfer.
In GET mode the data transfer is initiated externally
by pulling /CS low. In this case, as soon as the
measurement data is ready, it appears on the MOSI
pin (see also Section 4.3).
MOSI (Master Out Slave In, Output)
MOSI is the serial data output of the ASP1400 device.
Data is clocked out on the rising edge SCK with MSB
first. This output goes into a high-impedance state
when the device is not selected.
MISO (Master In Slave Out, Not Connected)
The ASP1400 firmware only supports a uni-directional
SPI protocol. Therefore, the MISO pin should always
left unconnected.
www.sensirion.com
September 2001 Preliminary Information
6/12
ASP1400 Bidirectional Differential Pressure Meter
faster sampling rates refer to the ASP1430 high
speed sensor data sheet.
3 Configuration and Commands
The ASP1400 device accepts a set of commands
through its RS-232 interface (see table 3 for valid
commands; for correct settings of the RS-232 refer to
Section 2.1).This allows the user to configure the
ASP1400 device. Since the configuration is stored in
the internal EEPROM, it is maintained after power
breaks.
Table 2: Resolution settings using the res=value command
and corresponding response times
res=
1
Resolution [bit] Data interval [ms]
With the exception of the stop command “s”, all
commands have to be terminated by the return key
(“↵ ”, ASCII #10 or #13). After completion of a
command, the ASP1400 returns “ok” and is ready to
take a new instruction. Before entering a command, it
may be necessary to clear the buffer by means of
using “↵ ”.
12.0
13.0
13.5
14.0
14.3
14.6
14.8
15.0
15.2
142
284
427
569
711
853
995
1138
1280
2
3
4
5
6
There is
a trade-off between resolution and
7
measurement time. Possible settings are listed in
Table 2. Choosing 12 bit results in a measurement
interval of 142 ms. With the max resolution of 15.2 bit,
a new measurement is provided every 1280 ms. For
8
9
Table 3: Commands of the ASP1400 device.
Command
Output
commands
version
Description
Lists all available commands
help↵
ver↵
Provides type of sensor, software, hardware and customer version
Starts single measurement
get↵
go↵
Starts series of measurements
s
stop
Stops series of measurements
reset↵
res=1..9↵
res?
Resets ASP1400 device
resolution
resolution
mode
Sets resolution: 1 -> 12 bits; 9 -> 15 bits, see Table 2
Shows actual setting
mod=F | T↵
mod?
Selects Differential Pressure mode (F) or Temperature mode (T)
Shows actual setting
mode
Shows Differential Pressure (s) or Differential Pressure + Temperature (d)
*no effect in the Temperature mode
Disp=s,d
display mode
Disp?
defspi=P | G↵
display mode Shows actual setting
define SPI
Sets SPI in Push- (P) or Get mode (G), see also Section 4.3
Notes:
• Default settings are marked in bold letters
• The commands are not case sensitive.
• In order to send a new command to the ASP1400 make sure the ASP1400 is not in measurement mode. Issue
therefore a stop command s first. After this, any instruction can be given to the ASP1400 and a new series of
measurement can be started by go↵.
• Due to the limited write cycles allowed for the EEPROM, excessive configuration modifications should be
avoided.
www.sensirion.com
September 2001 Preliminary Information
7/12
ASP1400 Bidirectional Differential Pressure Meter
4 Specifications ASP1400
4.1 Absolute Maximum Ratings
Ambient storage temperature
Ambient operating temperature
Overpresssure resistance
-65°C to 150°C
0°C to 70°C
2 bar
4.2 Electrical Specifications
Table 3: ASP1400 DC Characteristics.
Parameter
Conditions
Min.
7
Typ.
9
Max.
18
Units
V
mA
mA
mW
Power Supply DC
DC
VDD = 9 V, no load
VDD = 9 V, 3kΩ at RS232 output
VDD = 9 V, no load
20
Operating Current
Power Dissipation
27
180
Table 4: ASP1400 RS-232 Characteristics.
Parameter
Conditions
Transmitter output loaded with 3kΩ
Min.
Typ.
±9
Max.
Units
RS232 Output
Output Voltage Swing
Power-Off Output Resistance
Output Short Circuit Current
RS-232 Input
±5
300
V
Ω
mA
±18
Voltage Range
Voltage Threshold
Low
-15
0.8
15
V
1.2
1.7
0.5
5
V
V
High
2.4
1.0
7
Hysteresis
Resistance
0.2
3
V
kΩ
www.sensirion.com
September 2001 Preliminary Information
8/12
ASP1400 Bidirectional Differential Pressure Meter
Table 5: ASP1400 SPI Characteristics (refer to Figure 9 for a timing diagram).
Symbol Parameter
Conditions
not connected
not connected
Rl=100kΩ
Rl=100kΩ
Vdd = 5V
Min.
0
Typ.
0.2
4.9
0.2
4.45
-60
0.3
87
Max. Units
Vol
Voh
Vol
Voh
Ioh
Iol
Output Low Voltage
0.4
5
0.5
V
V
Output High Voltage
Output Low Voltage
Output High Voltage
Output High Current
Output Low Current
SCK Frequency
Output Rise Time
Output Fall Time
Output Rise Time
Output Fall Time
Clock High Time
Clock Low Time
/CS Setup Time
Send Time
4.8
0
V
2.4
V
µA
mA
kHz
ns
ns
ns
ns
µs
µs
Vdd = 5V
fop
tro
not connected
not connected
Rl=100kΩ
40
tfo
26
tro
42
tfo
30
Rl=100kΩ
tclh
tcll
5.70
5.80
tcss
tst
15.0
27.0
930
µs
µs
/CS
SCK
MOS
I
Figure 9: Timing Diagram of the ASP1400 SPI Interface.
www.sensirion.com
September 2001 Preliminary Information
9/12
ASP1400 Bidirectional Differential Pressure Meter
4.3 SPI Push-Mode Detailed Description
The subsequent scope diagrams further describe the ASP1400 device SPI mode data access protocol in PUSH
mode.
1 = SCK
2 = /CS
Serial clock output
Chip select (Push-Mode)
Serial data output
3 = MOSI
Complete read cycle (three bytes)
Close up of one byte
First byte
Third byte
Figure 10: Sample for SPI read cycle of the ASP1400 in Push Mode.
www.sensirion.com
September 2001 Preliminary Information
10/12
ASP1400 Bidirectional Differential Pressure Meter
5 Physical Dimensions and Mounting Information
The ASP1400 is mounted in chemically inert PBT housing.
The rugged package has been designed to withstand over-
pressures of up to 2 bar. Higher pressure packages of up
to 10 bars are available on request.
Physical dimensions and mounting information are
provided in Figure 11 and Table 6.
holes for ∅ 3 mm screws
nozzles for ∅ 6 mm
rubber hose.
h
Table 6: Physical Dimensions of the ASP1400 device.
Length
Width
L
45.0 mm
40.0 mm
15.5 mm
25.2 mm
5.0 mm
W
h
Height
Distance
Diameter
Pitch
D
d
s
2.54 mm
20.6 mm
29.1 mm
10.0 mm
Pitch
H
G
N
Pitch
Pitch
Holes for
PT screws
(∅ 2.2 mm, screw in
not more than 4.4 mm)
Figure 11: Physical dimensions and mounting information of the ASP1400.
6 Ordering Information
For small ordering quantities the ASP1400 sensor can be ordered directly at Farnell on http://www.farnell.com. Farnell is a
worldwide distributor of electrical, electronic and industrial component products.
When ordering ASP1400 series devices at SENSIRION please refer to the following part numbers. For the latest product
information access SENSIRION’s website on http://www.sensirion.com
Calibrated for Gas Type
Synthetic air
Other gas types on request
Range
± 100 Pa
± 100 Pa
Packaging
2 bar
2 bar
SENSIRION Part Number
1-100012
-
Notes:
•
•
•
•
Packages to sustain common mode pressures of 10 bars are available on request.
Special electrical interfaces such as 4-20 mA output or others are available on request.
For faster sensor response times contact SENSIRION for information on the ASP1430.
An evaluation kit including ASP1400 devices, evaluation software and other accessories such as bypass, rubber hose and
cables can be ordered (Part Number 1-100032). For detailed information check out the description of the Differential
Pressure Sensor Evaluation Kit ASP1400 EK-P1 on http://www.sensirion.com.
www.sensirion.com
September 2001 Preliminary Information
11/12
ASP1400 Bidirectional Differential Pressure Meter
IMPORTANT NOTICES
The warranty for each SENSIRION AG product
comes in the form of a written warranty which governs
sale and use of such product. Such warranty is
contained in the printed terms and conditions under
which such product is sold, or in a separate written
warranty supplied with the product. Please refer to
such written warranty with respect to its applicability
to certain applications of such product.
SENSIRION AG reserves the right, without further
notice, to change the SENSIRION ASP1400
Differential Pressure Sensor product specifications
and/or information in this document and to improve
reliability, functions and design.
SENSIRION AG assumes no responsibility or liability
for any use of the SENSIRION ASP1400 product.
Application examples and alternative uses of the
SENSIRION ASP1400 are for illustration purposes
only and SENSIRION AG makes no representation or
warranty that such applications shall be suitable for
the use specified.
These products may be subject to restrictions on use.
Please contact SENSIRION AG for a list of the
current additional restrictions on these products. By
purchasing these products, the purchaser of these
products agrees to comply with such restrictions.
Please contact SENSIRION AG for clarification of any
restrictions described herein.
SPI is a trademark of Motorola. LabView is a
trademark of National Instruments.
Copyright 2001, SENSIRION AG. All rights
reserved.
FCC and CE Statement
The ASP1400 product has been tested and found to
comply with the limits for a Class B digital device,
pursuant to part 15 of the FCC Rules (FCC CFR 47).
These limits are designed to provide reasonable
protection against harmful interference in a residential
installation. This equipment generates, uses and can
radiate radio frequency energy and, if not installed
and used in accordance with the instructions, may
cause harmful interference to radio communications.
However, there is no guarantee that interference will
not occur in a particular installation. If this equipment
does cause harmful interference to radio or television
reception, which can be determined by turning the
equipment off and on, the user is encouraged to try to
correct the interference by one of more of the
following measures:
•
•
Connect the equipment into an outlet on a
circuit different from that to which the
receiver is connected.
Consult a dealer or an experienced radio/TV
technician for help.
The ASP1400 device fully complies with norm EN
50081-1 (Emission Test for residential, commercial
and light industry), EN 50081-2 (Emission Test for
industrial environment) as well as EN 50082-1
(Immunity Test for residential, commercial and light
industry) and EN 50082-2 (Immunity Test for
industrial environment).
•
•
Reorient or relocate the receiving antenna.
Increase the separation between the
equipment and the receiver
Headquarters and Sales Office
SENSIRION AG
Eggbühlstr. 14
P.O. Box
Phone: + 41 (0)1 306 40 00
Fax:
+ 41 (0)1 306 40 30
e-mail: info@sensirion.com
http://www.sensirion.com/
CH-8052 Zürich
Switzerland
www.sensirion.com
September 2001 Preliminary Information
12/12
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