ESRF-ESF-050NL-01-01-02 概述
Resistive MEMS Gas Flow Sensor
ESRF-ESF-050NL-01-01-02 数据手册
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PDF下载Datasheet ESRF-ESF
Resistive MEMS Gas Flow Sensor
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State of the art performance due to MEMS resistive technology
High accuracy and resolution
<±1.25% RD Total Error Band
Wide dynamic range
Bidirectional Flow Measurement
Gas Flow sensor: up to ±300 ln/min
Temperature compensation: 0oC to +50oC
Calibrated & temperature compensated analog or digital output
Excellent long term stability
Low temperature drift
Compact size
Product Summary
ES Systems has developed ESRF-ESF, an inline gas flow sensor, based on the hot-film
anemometer principle for mass gas flow measurements.
ESRF-ESF is one of the few gas flow sensors featuring bidirectional gas flow sensing of up to
±300 ln/min with a total error band of <±1.25% RD. ESRF-ESF gas flow sensors provide
calibrated and temperature compensated output on an SPI, I2C bus or analog output making
them plug & play for direct interfacing to low voltage MCUs and systems. The user is provided
with a multitude of interface and output options so that the right sensor configuration can be
selected based on the specific requirements for each application.
Calibration gas is air but other non-aggressive gases are available upon request.
Typical Applications
Medical
Ventilation • Anesthesia • Inspiratory flow sensing • Gas mixing • Respiratory measurements •
Drug delivery • Expiratory flow measurement • Metabolic Measurements • Proximal Flow
measurement • Proximal flow measurement for infants / neonates • Expiratory flow
measurement for infants / neonates • Ventilation & Anesthesia for infants / neonates •
Respiratory measurements for infants / neonates • Metabolic Measurements for infants /
neonates • Oxygen concentrators and conservers • Respirators and ventilators • Nebulizers •
Continuous positive airway pressure (CPAP) • Anesthesia machines • Anesthesia delivery
machines, ventilators • ventricular assist devices (heart pumps), spirometers • laparoscopy
Industrial
Mass flow controllers (Telecommunication systems, Environmental climate controls, Fuel cell
controls, Process gas control welding equipment and lasers) • Analytic instrumentation
(spectrometry, chromatography) • Air-to-fuel ratio • Fuel cells • Fume hoods • Gas leak
detection • Process control gas monitoring • Vacuum pump monitoring • Clogging detection •
Flow measurement • Air volume measurement • Process automation • Burner control •
Environment monitoring • Laboratory
v1.6
Datasheet ESRF-ESF
1. Total Error Band
Total Error Band (TEB) is a single specification that includes all possible sources of error in a gas flow measurement.
TEB should not be confused with accuracy, which is actually a component of TEB. TEB is the worst error that the sensor
could experience. The TEB specification on a datasheet may be confusing. ES Systems uses the TEB specification in its
datasheet because it is the most comprehensive measurement of a sensor’s true accuracy. ES Systems also provides
the accuracy specification in order to provide a common comparison with competitors’ literature that does not use the
TEB specification.
All Possible Errors
Offset
Full Scale Span
Flow Non-Linearity
Flow Hysteresis
Accuracy
TEB
Noise
Flow Non-Repeatability
Thermal Effect on Offset
Thermal Effect on Span
Thermal Hysteresis
The figure below, illustrates the accuracy as well as the total error of the flow measurement of ESRF-ESF sensors.
Accuracy Performance
Range: 15, 20, 50, 100, 200, 300 ln/min
- 0% FS to 10%FS = ±0.125%FS
- 10%FS to 100%FS = ±1.0% RD
Total Error Band Performance
Range: 15, 20, 50, 100, 200, 300 ln/min
- 0% FS to 10%FS = ±0.125%FS
- 10%FS to 100%FS = ±1.25% RD
2/14
Datasheet ESRF-ESF
2. Absolute Maximum Ratings1
Characteristic
Min.
Max.
Unit
4.8
5.5
Vdc
Supply voltage (Vsupply
Voltage on any pin
Current on any pin
Burst pressure
)
-0.3
5.5
V
-
-
2
2
mA
barg
oC[oF]
ln/min
-20[-4]
-550
+85[+185]
550
Storage temperature
Maximum flow applied
1
Absolute maximum ratings are the extreme limits the device will withstand without damage. The electrical and
performance characteristics are not guaranteed as the maximum limits are approached, nor will the device necessarily
operate as specified at absolute maximum ratings. Prolonged operation at absolute maximum ratings will degrade
the device performance
CAUTION
CAUTION
IMPROPER USE
PRODUCT DAMAGE
Do not use these products to sense liquid flow.
Failure to comply with the instructions may
result in product damage.
Do not disassemble these products.
Failure to comply with the instructions may
result in product damage.
3. Operating Specifications
Characteristic
Min.
Typ.
Max.
5.2
Unit
V
1
Supply voltage (Vsupply
)
4.8
5.0
Supply current
-
-
80
mA
-
I2C, SPI, Analog
Output
Start-up time2
-
100
-
msec
oC[oF]
oC[oF]
% RH
-
Operating temp. range
-20[-4]
0[+32]
0
-
+85[+185]
+50[+122]
95
Compensated temp range
Relative humidity (non-condensing)
Pneumatic connection type
Compatible gases
-
-
ISO5356-1:2004
Inert non aggressive gases
-
Gas conversion factor
Air to O2
Air to N2
-
1.0190
0.9997
-
-
Update rate
1.6
-
-
-
ms
Digital bus frequency
-
100
kHz
Analog output loading
Sink
Source
-
-
10
20
mA
1The sensor is not reverse polarity protected. Incorrect application of supply voltage or ground to the wrong pin may
cause electrical failure
2After 95% of Vsupply reached
3/14
Datasheet ESRF-ESF
4. Flow Sensor Specifications
Characteristic
Absolute
Typ.
Unit
Min.
Max.
Flow direction
Unidirectional / bidirectional
-
Full scale ranges
Unidirectional
Bidirectional
10, 15, 20, 50, 100, 200, 300
ln/min1
±10, ±15, ±20, ±50, ±100, ±200, ±300
1.0
Flow cut2
%FS3
Max measured flow
-330
-
330
ln/min
-
Calibration gas
Clean, Dry Air4
Operating temp. range5
Compensated temp range6
-20[-4]
-
-
+85[+185]
oC[oF]
oC[oF]
bara
bara
bits
0[+32]
+50[+122]
Operating pressure
Proof pressure
1.0
-
-
1.3
1.7
-
-
Effective resolution
Response time
12
-
-
35
-
msec
Total error band7,8 (<10%FS)
-
±0.125
-
%FS
Total error band7 (>10%FS)
Accuracy10,11 (<10%FS)
-
-
-
-
-
±1.25
±0.125
±1.0
0.001
-
-
%RD9
%FS
-
Accuracy10 (>10%FS)
-
-
%RD
Orientation sensitivity12
%FS/o
%FSS14
Long term stability13
±0.1
1 In normal liters per minute at 0oC and 1013 mbar
2 Flow measured below this point will always indicate 0 ln/min
3 % of the full scale
4 Other, non-aggressive, gases available upon request
5
The temperature range over which the sensor will produce an output proportional to flow (Non condensing
humidity)
The temperature range over which the sensor will produce an output proportional to flow within the specified
6
performance limits. Note that for valid datasheet values, ambient and gas temperatures must be the same
7 The maximum deviation from ideal transfer function over the entire compensated temperature and flow range.
Includes all errors due to offset, full scale span, accuracy, thermal effect on offset, thermal effect on span and thermal
hysteresis
8 For the 10 ln/min FS flow option only, TEB for flows <10%FS is ±0.5%FS
9 % of the reading value
10
The maximum deviation in output from a Best Fit Straight Line (BFSL) fitted to the output measured over the flow
range at 21oC [69.8oF]. Includes all errors due to flow non-linearity, flow hysteresis, non-repeatability and noise
11 For the 10 ln/min FS flow option only, accuracy for flows <10%FS is ±0.5%FS
12 Added measurement error due to orientation deviation from the optimal (calibration) position
13 Accelerated Life Test Profile: 100hours at 90oC
14 Full Scale Span (FSS): The algebraic difference between the output signal measured at the maximum (Umax) and the
minimum (Umin) limits of the flow range
4/14
Datasheet ESRF-ESF
5. Flow Range Specifications (ln/min)
Flow Range
Pressure
Flow Range
Unit
Unit
Drop @ FS
1
2
Umin
Umax (Digital Output)
Umax (Analog Output)
0.1
11
16.5
22
10
15
ln/min
ln/min
ln/min
ln/min
ln/min
ln/min
ln/min
0.07
0.15
0.17
1
mbar
mbar
mbar
mbar
mbar
mbar
mbar
010NL
0.15
0.2
0.5
1
015NL
020NL
050NL
100NL
200NL
300NL
20
55
50
110
220
330
100
200
300
2.4
2
8.6
3
18.4
1 Flows below Umin will always indicate 0 ln/min
2 In order to improve the quality of the flow measurements, the digital output features an extra 10% flow range from
the nominal FS flow.
6. Temperature Sensor Specifications
Absolute
Characteristic
Unit
Min.
Typ.
Max.
oC[oF]
oC
Full Scale range
0 [+32]
-
+50 [+122]
Accuracy
-
0.5
-
8
-
-
bits
Resolution
5/14
Datasheet ESRF-ESF
7. Data & Register Description
The ESRF-ESF sensors provide measurement and status data. The measurement data are
flow rate and temperature whilst the status data refer to the sensors factory programed
serial number. The data are stored in specific data registers as described below. The readout
is performed by using multibyte read transactions.
Flow Data Register [0x00]
DEFAULT VALUE
ADDRESS
0x00
REGISTER NAME
Calibrated Flow Byte 1
Calibrated Flow Byte 2
TYPE
MNEMONIC
CAL_DATA[15:8]
CAL_DATA[7:0]
(Hex)
R
R
Variable
Variable
When performing transaction with the ESRF-ESF sensors the returned data is always MSB
first. Flow is represented as a 16-bit, two’s complement number. The lowest number in the
Flow Data Register is 0x8000 (-32768 in Decimal) and the highest number is 0x7FFF (32767 in
Decimal). In unidirectional ESF sensors output data higher than 0x7FFF must be ignored.
Calibrated flow (in SLPM) can be calculated using the following formula:
Eq. 1
An example of unidirectional flow:
Flow Register Byte [0] = 0x3F
Flow Register Byte [1] = 0xFF
Using the formula (Eq 1) and assuming a full scale flow of 200 ln/min, the calculated output
should be 109.9932 ln/min
An example of bidirectional flow:
Flow Register Byte [0] = 0xFC
Flow Register Byte [1] = 0x18
Using the formula (Eq.1) and assuming a full scale flow of 200 ln/min, the calculated output
should be –6.7139 ln/min
6/14
Datasheet ESRF-ESF
Temperature Data Register [0x01]
ADDRESS
0x01
REGISTER NAME
TYPE DEFAULT VALUE
MNEMONIC
Calibrated Temp Byte 1
R
R
Variable
Variable
CAL_DATA[15:8]
Calibrated Temp Byte 2
CAL_DATA[7:0]
Temperature is represented as a 16-bit, unsigned integer number. The lowest number in the
Temperature Data Register is 0x0000 (0 in Decimal) and the highest number is 0xFFFF (65535
o
in Decimal). The full data representation range of this register in C is from –20oC to +80oC.
However, the temperature sensor accuracy is defined within the temperature compensation
range of the device which is from 0oC to +50oC .
Calibrated Temperature (in oC) can be calculated using the following formula:
Eq. 2
An example of Temperature conversion:
Temperature Register Byte [0] = 0x84
Temperature Register Byte [1] = 0x32
Using the formula (Eq. 2) the calculated output should be 31.64oC
Serial Number Register [0x03]
DEFAULT
VALUE (Hex)
ADDRESS
0x03
REGISTER NAME
TYPE
MNEMONIC
Serial Number Byte 1
Serial Number Byte 2
Serial Number Byte 3
Serial Number Byte 4
R
R
R
R
Fixed ID
SER_NO[31:24]
SER_NO[23:16]
SER_NO[15:8]
SER_NO[7:0]
Fixed ID
Fixed ID
Fixed ID
Each ESRF-ESF sensor is uniquely identified by a 32-bit serial number. This number can be
read from the Serial Number Register and is 4 bytes long.
An example of a serial number conversion:
Serial No Register Byte [0] = 0x01
Serial No Register Byte [1] = 0x05
Serial No Register Byte [2] = 0x62
Serial No Register Byte [3] = 0x1F
The serial number 0x0105621F corresponds to 17130015 in decimal.
7/14
Datasheet ESRF-ESF
Software Reset Function [0xFE]
The device has an additional option to perform a software reset via the I2C communication
interface. This option is useful in specific cases depending on the application. For instance,
the user could issue a S/W reset to assure correct initialization after a hot-plug connection.
The procedure to reset the device is the same as changing a register, followed by the byte
0xFE. In other words, the user must first send the byte 0x8A (7 bit address plus write bit) and
then the byte 0xFE (I2C Mode) or just 0xFE (SPI Mode). The device will then return its
acknowledge bit and immediately reset itself. After 100 milliseconds, the device will be ready
to give its first valid sample.
8. I2C Interface
VDD
SDA
Master
MCU
FLOW
SCL
At power on reset, the sensor defaults to transmission of the contents of the Flow Data
Register. If the master device transmits the selected sensor 7-bit address (0x45) with R/W bit
set, the sensor returns the contents of the Flow Data Register after acknowledging (ACK) by
holding the SDA line low. The master should then provide at least 18 clock pulses on the SCL
line in order to readout the two Flow Data Bytes. An acknowledge bit (ACK) should be provided
by the master on each byte received by holding the SDA line low while providing the 9th clock
pulse. The same frame structure also applies to a Temperature Data transaction. An example
of such a transaction can be seen below.
S
SlaveAdd+W
A
Register Add
A
S
SlaveAdd+R
A
Data 0
A
DataN
N P
SCL
...
SDA
Start
Stop
SlaveACK
Master ACK
Master NACK
If in any case the master sends a slave address or a register address that is not recognized a
NACK condition will be returned by the sensor. The sensor supports clock stretching
functionality
8/14
Datasheet ESRF-ESF
9. SPI Interface
MOSI
MISO
SCLK
CS
Master
MCU
FLOW
ESRF-ESF sensors have the option of a serial peripheral interface communication following
the memory mapping as described in section 9. The sensor uses MODE 0 SPI with CPOL = 0
and CPHA = 0.
The SPI communication requires to send, via the MOSI signal, the address to read and then
the following clock pulses will produce the required result on the MISO line. The following
examples describe the SPI transactions for reading the flow and the temperature output of
the sensor.
CS
SCLK
MOSI
0x00
DON T CARE
FLOW BYTE [0]
FLOW BYTE [1]
MISO
CS
SCLK
MOSI
0x01
DON T CARE
TEMPERATURE BYTE [0]
TEMPERATURE BYTE [1]
MISO
9/14
Datasheet ESRF-ESF
10. Analog Interface
PSU
ꢀꢁ5.0VDC
MULTIMETER
or
FLOW
DATA ACQUISITION
SYSTEM
ESRF-ESF sensors also feature the option of an analog voltage output (+0.5 to +4.5V), which
allows for the readout of flow in an analog way by means of a data acquisition system or a
multimeter. In this case the user needs to ensure that the power supply can sustain the
power requirements of the sensor at full flow as specified in the electrical specifications table.
As this is a voltage output configuration the user must ensure that the cables running from
the sensor to the data acquisition system are as short as possible to prevent errors from
potential voltage drops. It should be noted that the min analog voltage output is 0.5V and the
maximum 4.5V
Eq. 3
Eq. 4
17. Wetted Matterials1
Component
Flow Port
Glass Reinforced Thermoplastic, Gold, Si, SiN, SiOx, epoxy,
silicon rubber, FR4, polyurethane, SS316, Fluoropolymer
Ports and covers
Housing
Glass Reinforced thermoplastic
Substrate
Adhesives
Gold, FR4
Epoxy
Weight
50.6g
Directives compliance
RoHS, WEEE, CE
1 Contact ES Systems Customer Service for detailed material information
10/14
Datasheet ESRF-ESF
11. Pinout
Output1
I2C
PIN1
PIN2
PIN3
PIN4
PIN5
PIN6
NC
NC
VCC
GND
SDA
SCL
CS
MISO
VCC
VCC
GND
GND
MOSI
NC
SCLK
NC
SPI
Output +
Output –2
Analog
1 Connector P/N: S6B-PH-K-S, manufacturer: JST
2 Analog ground
12. Environmental Specifications
Characteristic
Parameter
IEC IP40 (excluding tubing sections)
Wetted materials degree of protection
15g, 10Hz to 2 kHz
100g, 6ms duration
Vibration
Shock
ESD IEC6100-4-2 air discharge up to 8 kV, or direct
contact discharge up to 4 kV
ESD
level 3 from 80 MHz to 1000 MHz per IEC61000-4-
3, 1m shielded cable with 3cm exposed leads at
connector.
EMC/EMI
Life1
1 million flow cycles minimum
1 Life may vary depending on specific application in which the sensor is used
15. Mechanical Specifications (all dimensions in mm)
11/14
Datasheet ESRF-ESF
13. Instructions of Use
Calibration orientation
The ESRF-ESF sensors are calibrated in a horizontal position. As depicted in the following
graph.
For optimal performance, the sensor requires at least 20x ID of laminarizing pipe length in the
flow inlet and another 20x ID in the outlet. ESRF-ESF sensors are calibrated using 20mm ID
pipe diameter. The diameter of the inlet and outlet flow pipes should be as close to the
calibration diameter as possible. It is also possible to insert O-rings in the grooves and attach
tubes with an inner diameter of 23 mm to the ESRF-ESF. The dimensions of the O-ring are
illustrated bellow.
Temperature compensation
The ESRF-ESF sensor features digital temperature compensation. The temperature is
measured on the MEMS element by an on-chip temperature sensor. This data is fed to a
compensation circuit that is also integrated on the microprocessor. Thus, no external
temperature compensation is necessary.
Sensor Handling
The ESRF-ESF sensor is designed to be robust and shock resistant. Nevertheless, the accuracy
of the high-precision ESRF-ESF can be degraded by rough handling. ES Systems does not
guarantee proper operation in case of improper handling.
12/14
Datasheet ESRF-ESF
14. Ordering Information
ESRF-ESF-NNNNN-NN-NN-NN-N
Temperature Sensor
Flow Range1
FS (ln/min)
Directionality
Y
Yes
010NL
10
01
Unidirectional
N
No
015NL
020NL
050NL
100NL
200NL
300NL
15
20
02
Bidirectional
Gas
50
Output Type
01
Air
I2C
100
200
300
01
02
03
02
Other
SPI
0.5-4.5V
1Custom calibration ranges are available upon request
13/14
Datasheet ESRF-ESF
Important Notes
No warranty applies to any party other than the original
Customer. The remedies of the Customer set forth
herein are exclusive and the total liability of ES Systems
with respect to this order, whether based on contract,
warranty, negligence, indemnification, strict liability or
otherwise, shall not exceed the purchase price of the
component upon which liability is based.
PERSONAL INJURY
DO NOT USE these products as safety or emergency
stop devices, or in any other application where
failure of the product could result in personal injury.
Failure to comply with these instructions could result in
death or serious injury.
In no event shall ES Systems be liable for consequential,
incidental or special damages.
WARRANTY
ES Systems warrants this Product to be free of defects in
materials and workmanship for a period of one (1) year
from the date of purchase.
Specifications may change without notice. The
information supplied is believed to be accurate and
reliable as of this issue; however, ES Systems assumes no
responsibility for its use.
Upon examination by ES Systems, if the unit is found to
be defective it will be repaired or replaced at no charge.
ES Systems' WARRANTY does not apply to defects
resulting from any action of the purchaser, including but
not limited to mishandling, improper interfacing,
operation outside of design limits, improper repair, or
unauthorized modification. This WARRANTY is VOID if the
unit shows evidence of having been tampered with or
Contact Information
ES Systems S.A.
Head Office:
7, Stratigi St., GR-154 51
Neo Psychico, Greece
Tel: (+30) 210 672 8610,
Fax (+30) 210 672 8624
shows evidence of being damaged as
excessive corrosion; or current, heat, moisture or
vibration;
a result of
Factory:
57, I.Metaxa str., GR-194 41
Koropi, Greece
Tel: (+30) 216 2000 500,
Fax (+30) 216 2000 555
improper specification; misapplication; misuse or other
operating conditions outside of ES Systems' control.
Components which wear are not warranted.
ES Systems neither assumes responsibility for any
omissions or errors nor assumes liability for any
damages that result from the use of its Product in
accordance with information provided by ES Systems,
either verbal or written. ES Systems warrants only that
the parts manufactured by it will be as specified and free
of defects.
ES SYSTEMS MAKES NO OTHER WARRANTIES OR
REPRESENTATIONS OF ANY KIND WHATSOEVER,
EXPRESSED OR IMPLIED, EXCEPT THAT OF TITLE, AND
ALL
IMPLIED
WARRANTIES
INCLUDING
ANY
WARRANTY OF MERCHANTABILITY AND FITNESS FOR
A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED.
No representative of ES Systems is authorized to extend
this Warranty or to change it in any manner whatsoever.
14/14
ESRF-ESF-050NL-01-01-02 相关器件
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ESRF-ESF-050NL-01-01-03 | ES | Resistive MEMS Gas Flow Sensor | 获取价格 | |
ESRF-ESF-050NL-01-02-01 | ES | Resistive MEMS Gas Flow Sensor | 获取价格 | |
ESRF-ESF-050NL-01-02-02 | ES | Resistive MEMS Gas Flow Sensor | 获取价格 | |
ESRF-ESF-050NL-01-02-03 | ES | Resistive MEMS Gas Flow Sensor | 获取价格 | |
ESRF-ESF-050NL-02-01-01 | ES | Resistive MEMS Gas Flow Sensor | 获取价格 | |
ESRF-ESF-050NL-02-01-02 | ES | Resistive MEMS Gas Flow Sensor | 获取价格 | |
ESRF-ESF-050NL-02-01-03 | ES | Resistive MEMS Gas Flow Sensor | 获取价格 | |
ESRF-ESF-050NL-02-02-01 | ES | Resistive MEMS Gas Flow Sensor | 获取价格 | |
ESRF-ESF-050NL-02-02-02 | ES | Resistive MEMS Gas Flow Sensor | 获取价格 | |
ESRF-ESF-050NL-02-02-03 | ES | Resistive MEMS Gas Flow Sensor | 获取价格 |
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